using padDLL;
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using SA_LTT;
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using SA_LTT.Info.WaferInfo;
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using SA_LTT.Module;
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using SA_LTT_UI.Screen;
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using System;
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using System.Drawing;
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using System.Windows.Forms;
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using static SA_LTT.Info.WaferInfo.WaferInfoManager;
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namespace SA_LTT_UI.Viewer
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{
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public partial class ChamberViewer : Form
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{
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MainFrame _mainFrame;
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ChamberStatus _chamberStatus = new ChamberStatus();
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protected override CreateParams CreateParams
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{
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get
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{
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CreateParams MyCp = base.CreateParams;
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MyCp.ExStyle |= 0x02000000;
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return MyCp;
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}
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}
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public ChamberViewer(MainFrame mainFrame)
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{
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InitializeComponent();
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_mainFrame = mainFrame;
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elementHost1.Child = _chamberStatus;
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timer.Start();
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}
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private void timer_Tick(object sender, System.EventArgs e)
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{
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_chamberStatus.SetChamberGate(_mainFrame.equipment.chamber.IsGateOpen);
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_chamberStatus.SetChamberWaferExist(_mainFrame.equipment.chamber.WaferInfo);
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_chamberStatus.SetChamberWaferNum(_mainFrame.equipment.chamber.WaferInfo.SourceNumber);
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lb_ChamberWaferExist.BackColor = _mainFrame.equipment.chamber.WaferInfo.IsStatus == WaferInfo.WaferStatus.Exist ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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tb_Status.Text = _mainFrame.equipment.chamber.WaferInfo.IsStatus.ToString();
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tb_CarrierID.Text = _mainFrame.equipment.chamber.WaferInfo.CarrierID;
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tb_LotID.Text = _mainFrame.equipment.chamber.WaferInfo.LotID;
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tb_SourceNum.Text = _mainFrame.equipment.chamber.WaferInfo.SourceNumber.ToString();
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tb_IsFlip.Text = _mainFrame.equipment.chamber.WaferInfo.IsFlip ? "Flip" : "NonFlip";
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tb_RecipeName.Text = _mainFrame.equipment.chamber.WaferInfo.RecipeName;
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tb_ChamberVacuumPressure.Text = _mainFrame.equipment.chamber.ChamberVacuumPressure.ToString();
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tb_N2PTPPressure.Text = _mainFrame.equipment.chamber.N2PTPressure.ToString();
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tb_MainCDAFlow.Text = _mainFrame.equipment.chamber.MainCDAFlow.ToString();
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tb_MFCFlow.Text = _mainFrame.equipment.chamber.MFCFlow.ToString();
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lb_LiftPinUp.BackColor = _mainFrame.equipment.chamber.IsLiftPinUp ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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lb_VacuumOn.BackColor = _mainFrame.equipment.chamber.IsChuckVacuumSensorOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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lb_GateOpen.BackColor = _mainFrame.equipment.chamber.IsGateOpen ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_VacuumOn.BackColor = _mainFrame.equipment.chamber.IsChuckVacuumOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_VacuumOff.BackColor = !_mainFrame.equipment.chamber.IsChuckVacuumOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_LiftPinUp.BackColor = _mainFrame.equipment.chamber.IsLiftPinUp ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_LiftPinDown.BackColor = !_mainFrame.equipment.chamber.IsLiftPinUp ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_GateOpen.BackColor = _mainFrame.equipment.chamber.IsGateOpen ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_GateClose.BackColor = !_mainFrame.equipment.chamber.IsGateOpen ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_N2ChamberValveOpen.BackColor = _mainFrame.equipment.chamber.IsN2ChamberValveOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_N2ChamberValveClose.BackColor = !_mainFrame.equipment.chamber.IsN2ChamberValveOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_N2MFCValveOpen.BackColor = _mainFrame.equipment.chamber.IsN2MFCValveOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_N2MFCValveClose.BackColor = !_mainFrame.equipment.chamber.IsN2MFCValveOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_ByPassValveOpen.BackColor = _mainFrame.equipment.chamber.IsByPassValveOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_ByPassValveClose.BackColor = !_mainFrame.equipment.chamber.IsByPassValveOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_AirBlowOpen.BackColor = _mainFrame.equipment.chamber.IsAirBlowOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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btn_AirBlowClose.BackColor = !_mainFrame.equipment.chamber.IsAirBlowOn ? System.Drawing.Color.Lime : System.Drawing.Color.Red;
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tb_MFCSetPoint.Text = _mainFrame.equipment.chamber.MFCSetPoint.ToString();
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MotorInfo();
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}
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private double[] m_dOldPos = new double[(int)PmacAxis.enMax];
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private double[] m_dOldSpeed = new double[(int)PmacAxis.enMax];
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private bool[,] m_bOldStatus = new bool[(int)PmacAxis.enMax, 6];
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private void MotorInfo()
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{
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try
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{
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Label[] lblPos = { lblPos1, lblPos2, lblPos3 };
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Label[] lblVel = { lblVel1, lblVel2, lblVel3 };
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Label[] lblServo = { lblServo1, lblServo2, lblServo3 };
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Label[] lblPLimit = { lblPLimit1, lblPLimit2, lblPLimit3 };
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Label[] lblNLimit = { lblNLimit1, lblNLimit2, lblNLimit3 };
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Label[] lblInPos = { lblInPos1, lblInPos2, lblInPos3 };
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int nCnt = 0;
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for (int i = 0; i < (int)PmacAxis.enMax; i++)
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{
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nCnt = 0;
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//Pos
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if (m_dOldPos[i] != _mainFrame.equipment.powerPmac.GetAxisActualPos((PmacAxis)i))
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{
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m_dOldPos[i] = _mainFrame.equipment.powerPmac.GetAxisActualPos((PmacAxis)i);
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lblPos[i].Text = m_dOldPos[i].ToString();
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}
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//Vel
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if (m_dOldSpeed[i] != _mainFrame.equipment.powerPmac.GetAxisActualSpeed((PmacAxis)i))
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{
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m_dOldSpeed[i] = _mainFrame.equipment.powerPmac.GetAxisActualSpeed((PmacAxis)i);
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lblVel[i].Text = m_dOldSpeed[i].ToString();
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}
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//Servo
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if (m_bOldStatus[i, nCnt] != _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.ServoOn))
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{
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m_bOldStatus[i, nCnt] = _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.ServoOn);
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if (m_bOldStatus[i, nCnt])
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lblServo[i].BackColor = Color.Green;
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else
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lblServo[i].BackColor = Color.Transparent;
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}
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nCnt++;
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//PLIMIT
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if (m_bOldStatus[i, nCnt] != _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.PLimit_HW))
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{
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m_bOldStatus[i, nCnt] = _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.PLimit_HW);
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if (m_bOldStatus[i, nCnt])
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lblPLimit[i].BackColor = Color.Red;
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else
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lblPLimit[i].BackColor = Color.Transparent;
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}
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nCnt++;
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//NLIMIT
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if (m_bOldStatus[i, nCnt] != _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.NLimit_HW))
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{
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m_bOldStatus[i, nCnt] = _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.NLimit_HW);
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if (m_bOldStatus[i, nCnt])
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lblNLimit[i].BackColor = Color.Red;
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else
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lblNLimit[i].BackColor = Color.Transparent;
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}
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nCnt++;
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nCnt++;
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//INPOS
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if (m_bOldStatus[i, nCnt] != _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.InPos))
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{
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m_bOldStatus[i, nCnt] = _mainFrame.equipment.powerPmac.GetAxisStatus((PmacAxis)i, AxisStatus.InPos);
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if (m_bOldStatus[i, nCnt])
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lblInPos[i].BackColor = Color.Green;
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else
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lblInPos[i].BackColor = Color.Transparent;
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}
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}
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}
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catch (Exception ex)
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{
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EquipmentLogManager.Instance.WriteExceptionLog(ex.StackTrace + "\r\n" + ex.Message);
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}
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}
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private void ChamberViewer_FormClosing(object sender, FormClosingEventArgs e)
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{
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e.Cancel = true;
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this.Hide();
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}
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private void btn_VacuumOn_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Chamber vacuum on");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Vacuum On");
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_mainFrame.equipment.chamber.ChuckVacuumOn();
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}
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}
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private void btn_VacuumOff_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Chamber vacuum off");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Vacuum Off");
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_mainFrame.equipment.chamber.ChuckVacuumOff();
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}
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}
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private void btn_LiftPinUp_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Lift pin up");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : LiftPin Up");
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_mainFrame.equipment.chamber.LiftPinUp();
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}
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}
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private void btn_LiftPinDown_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Lift pin down");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : LiftPin Down");
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_mainFrame.equipment.chamber.LiftPinDown();
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}
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}
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private void btn_GateOpen_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Chamber gate open");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Gate Open");
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_mainFrame.equipment.chamber.GateOpen();
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}
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}
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private void btn_GateClose_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Chamber gate close");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Gate Close");
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_mainFrame.equipment.chamber.GateClose();
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}
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}
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private void btn_N2ChamberValveOpen_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "N2 Chamber Valve Open");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : N2 Chamber Vale Open");
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_mainFrame.equipment.chamber.N2ChamberValveOn();
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}
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}
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private void btn_N2ChamberValveClose_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "N2 Chamber Valve Close");
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ioPad.ShowDialog();
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if (ioPad.DialogResult == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : N2 Chamber Vale Close");
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_mainFrame.equipment.chamber.N2ChamberValveOff();
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}
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}
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private void btn_N2MFCValveOpen_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "N2 MFC Valve Open");
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if (ioPad.ShowDialog() == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : N2 MFC Vale Open");
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_mainFrame.equipment.chamber.N2MFCValveOn();
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}
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}
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private void btn_N2MFCValveClose_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "N2 MFC Valve Close");
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if (ioPad.ShowDialog() == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : N2 MFC Vale Close");
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_mainFrame.equipment.chamber.N2MFCValveOff();
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}
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}
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private void btn_ByPassValveOpen_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "ByPass Valve Open");
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if (ioPad.ShowDialog() == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : By pass valve Open");
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_mainFrame.equipment.chamber.ByPassValveOn();
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}
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}
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private void btn_ByPassValveClose_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "ByPass Valve Close");
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if (ioPad.ShowDialog() == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : By pass valve Close");
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_mainFrame.equipment.chamber.ByPassValveOff();
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}
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}
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private void btn_AirBlowOpen_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Air Blow Open");
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if (ioPad.ShowDialog() == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Air Blow Open");
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_mainFrame.equipment.chamber.AirBlowOn();
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}
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}
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private void btn_AirBlowClose_Click(object sender, System.EventArgs e)
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{
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var ioPad = new DigitalIoPad();
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ioPad.Setup(PadItem.NoYes, "Air Blow Close");
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if (ioPad.ShowDialog() == DialogResult.OK)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Air Blow Close");
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_mainFrame.equipment.chamber.AirBlowOff();
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}
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}
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private void tb_MFCSetPoint_Click(object sender, System.EventArgs e)
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{
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var nPad = new NumericPad();
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nPad.Setup("0", "10"); //범위 변경해야 함
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if (nPad.ShowDialog() == DialogResult.OK)
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{
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double value = 0;
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if (double.TryParse(nPad.GetValue(), out value))
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : MFC set {value}");
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_mainFrame.equipment.chamber.SetMFCFlow(value);
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}
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}
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}
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private void btn_JogXPlus_MouseDown(object sender, MouseEventArgs e)
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{
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double velocity = (double)nud_JogSpeed.Value;
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Positive Jog X speed {velocity}");
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_mainFrame.equipment.powerPmac.MoveJog(PmacAxis.X_Axis, velocity, MotionDirection.Plus);
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}
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private void btn_JogXPlus_MouseUp(object sender, MouseEventArgs e)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Stop Jog X");
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_mainFrame.equipment.powerPmac.MoveStop(PmacAxis.X_Axis);
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}
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private void btn_JogXMinus_MouseDown(object sender, MouseEventArgs e)
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{
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double velocity = (double)nud_JogSpeed.Value;
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Negative Jog X speed {velocity}");
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_mainFrame.equipment.powerPmac.MoveJog(PmacAxis.X_Axis, velocity, MotionDirection.Minus);
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}
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private void btn_JogXMinus_MouseUp(object sender, MouseEventArgs e)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Stop Jog X");
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_mainFrame.equipment.powerPmac.MoveStop(PmacAxis.X_Axis);
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}
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private void btn_JogYPlus_MouseDown(object sender, MouseEventArgs e)
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{
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double velocity = (double)nud_JogSpeed.Value;
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Positive Jog Y speed {velocity}");
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_mainFrame.equipment.powerPmac.MoveJog(PmacAxis.Y_Axis, velocity, MotionDirection.Plus);
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}
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private void btn_JogYPlus_MouseUp(object sender, MouseEventArgs e)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Stop Jog Y");
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_mainFrame.equipment.powerPmac.MoveStop(PmacAxis.Y_Axis);
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}
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private void btn_JogYMinus_MouseDown(object sender, MouseEventArgs e)
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{
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double velocity = (double)nud_JogSpeed.Value;
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Negative Jog Y speed {velocity}");
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_mainFrame.equipment.powerPmac.MoveJog(PmacAxis.Y_Axis, velocity, MotionDirection.Minus);
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}
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private void btn_JogYMinus_MouseUp(object sender, MouseEventArgs e)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Stop Jog Y");
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_mainFrame.equipment.powerPmac.MoveStop(PmacAxis.Y_Axis);
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}
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private void MoveTeachPosition(PmacAxis axis, EnTeachData teachData)
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{
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double dPos = _mainFrame.equipment.powerPmac.m_AxisAllList[(int)axis].TeachList[(int)teachData].Position;
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double dSpeed = _mainFrame.equipment.powerPmac.m_AxisAllList[(int)axis].TeachList[(int)teachData].Speed;
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double dAcc = _mainFrame.equipment.powerPmac.m_AxisAllList[(int)axis].TeachList[(int)teachData].Accel;
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_mainFrame.equipment.powerPmac.MoveAbs(axis, dPos, dSpeed, dAcc);
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}
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private void btn_LoadPosition_Click(object sender, EventArgs e)
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{
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if (MessageBox.Show("Load Position으로 이동 하시겠습니까?", "확인", MessageBoxButtons.YesNo) == DialogResult.Yes)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Move Load Position");
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MoveTeachPosition(PmacAxis.Y_Axis, EnTeachData.LoadPosY);
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MoveTeachPosition(PmacAxis.X_Axis, EnTeachData.LoadPosX);
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MoveTeachPosition(PmacAxis.T_Axis, EnTeachData.LoadPosT);
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}
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}
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private void btn_PowerMeterPosition_Click(object sender, EventArgs e)
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{
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if (MessageBox.Show("Powermeter Position으로 이동 하시겠습니까?", "확인", MessageBoxButtons.YesNo) == DialogResult.Yes)
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{
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if (_mainFrame.equipment.chamber.IsCenterPosition)
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{
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_mainFrame.equipment.chamber.MovePowerMeterPosition();
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Move PowerMeter Position");
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}
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else
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{
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MessageBoxPad mbp = new MessageBoxPad("Center 위치에서 이동 할 수 있습니다.");
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mbp.Show();
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}
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}
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}
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private void btn_CenterPosition_Click(object sender, EventArgs e)
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{
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if (MessageBox.Show("Center Position으로 이동 하시겠습니까?", "확인", MessageBoxButtons.YesNo) == DialogResult.Yes)
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{
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Move Center Position");
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_mainFrame.equipment.chamber.MoveCenterPosition();
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}
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}
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private void btn_BeamProfilePosition_Click(object sender, EventArgs e)
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{
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if (MessageBox.Show("BeamProfile Position으로 이동 하시겠습니까?", "확인", MessageBoxButtons.YesNo) == DialogResult.Yes)
|
{
|
if (_mainFrame.equipment.chamber.IsCenterPosition)
|
{
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_mainFrame.equipment.chamber.MoveBeamProfilePosition();
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EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Move BeamProfile Position");
|
}
|
else
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{
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MessageBoxPad mbp = new MessageBoxPad("Center 위치에서 이동 할 수 있습니다.");
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mbp.Show();
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}
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}
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}
|
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private void btn_ManualRun_Click(object sender, EventArgs e)
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{
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if (MessageBox.Show("Manual 가공을 진행 하시겠습니까?", "확인", MessageBoxButtons.YesNo) == DialogResult.Yes)
|
{
|
if (_mainFrame.equipment.EquipmentMode == EquipmentMode.Teach || _mainFrame.equipment.EquipmentStatus == EquipmentStatus.Fault || _mainFrame.equipment.ProcessStatus != ProcessStatus.Idle)
|
{
|
if (_mainFrame.equipment.EquipmentMode == EquipmentMode.Teach)
|
{
|
MessageBoxPad mbp = new MessageBoxPad("Equipment Mode가 Teach 입니다.");
|
mbp.Show();
|
}
|
|
if (_mainFrame.equipment.EquipmentStatus == EquipmentStatus.Fault)
|
{
|
MessageBoxPad mbp = new MessageBoxPad("Equipment 상태가 Fault 입니다.");
|
mbp.Show();
|
}
|
|
if (_mainFrame.equipment.ProcessStatus != ProcessStatus.Idle)
|
{
|
MessageBoxPad mbp = new MessageBoxPad("Process 상태가 Idle이 아닙니다.");
|
mbp.Show();
|
}
|
|
return;
|
}
|
|
if (_mainFrame.equipment.ManualProcessStart())
|
{
|
EquipmentLogManager.Instance.WriteButtonLog($"{this.Name} : {((Control)sender).Text}");
|
|
}
|
}
|
}
|
|
private void btn_AlignPosition_Click(object sender, EventArgs e)
|
{
|
if (MessageBox.Show("Align Position으로 이동 하시겠습니까?", "확인", MessageBoxButtons.YesNo) == DialogResult.Yes)
|
{
|
if (_mainFrame.equipment.chamber.IsCenterPosition)
|
{
|
_mainFrame.equipment.chamber.MoveAlignPosition();
|
EquipmentLogManager.Instance.WriteButtonLog($"ChamberViewer : Move Align Position");
|
}
|
else
|
{
|
MessageBoxPad mbp = new MessageBoxPad("Center 위치에서 이동 할 수 있습니다.");
|
mbp.Show();
|
}
|
}
|
}
|
}
|
}
|
