<?xml version="1.0" encoding="utf-8"?>
|
<WaferInfo xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
|
<IsStatus>Empty</IsStatus>
|
<IsFlip>false</IsFlip>
|
<IsProcessComplete>false</IsProcessComplete>
|
<CarrierID />
|
<LotID />
|
<RecipeName />
|
<SourceNumber>B13</SourceNumber>
|
</WaferInfo>
|
