BOOK-IQ4TD9B9LB\DIT-930
2023-05-15 f5120e92b525474f6b4e50130797946986c28eed
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<?xml version="1.0" encoding="utf-8"?>
<SettingParameter xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <EnergyDropCheckCycle>8</EnergyDropCheckCycle>
  <EnergyDropCheckMeasurementTime>10</EnergyDropCheckMeasurementTime>
  <EnergyDropCheckTargetAngle>40</EnergyDropCheckTargetAngle>
  <EnergyDropCheckTargetEnergy>3.879</EnergyDropCheckTargetEnergy>
  <EnergyDropCheckErrorOccuredRange>3</EnergyDropCheckErrorOccuredRange>
  <AttenuatorCalCycle>10</AttenuatorCalCycle>
  <AttenuatorCalMeasurementTime>10</AttenuatorCalMeasurementTime>
  <AttenuatorCalCoolingTime>10</AttenuatorCalCoolingTime>
  <AttenuatorCalStartAngle>2</AttenuatorCalStartAngle>
  <AttenuatorCalEndAngle>43</AttenuatorCalEndAngle>
  <AttenuatorCalAngleStep>2</AttenuatorCalAngleStep>
  <EnergyMeasurementCycle>180</EnergyMeasurementCycle>
  <EnergyMeasurementWaferCountCycle>5</EnergyMeasurementWaferCountCycle>
  <EnergyMeasurementErrorOccuredRange>5</EnergyMeasurementErrorOccuredRange>
  <EnergyMeasurementTime>10</EnergyMeasurementTime>
  <EnergyMeasurmentStepAngle>0.5</EnergyMeasurmentStepAngle>
  <EnergyMeasurementRetryCount>15</EnergyMeasurementRetryCount>
  <EnergyMeterHeatingTime>5</EnergyMeterHeatingTime>
  <BeamHeight>0.59</BeamHeight>
  <BeamWidth>0.59</BeamWidth>
  <CenterToVisionPositionX>28.425</CenterToVisionPositionX>
  <CenterToVisionPositionY>-198.87</CenterToVisionPositionY>
  <VisionTimeOut>5</VisionTimeOut>
  <VisionHeartBeatTimeOut>3</VisionHeartBeatTimeOut>
</SettingParameter>