using SA_LTT.Info.WaferInfo;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace SA_LTT.Module
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{
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public class Chamber
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{
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private Equipment _equipment;
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public bool IsGateOpen
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{
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get
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{
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return _equipment.crevis.DigitalInputs[Crevis.DigitalInput.CMB_GATE_OPEN];
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}
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}
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public bool IsGateClose
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{
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get
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{
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return _equipment.crevis.DigitalInputs[Crevis.DigitalInput.CMB_GATE_CLOSE];
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}
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}
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public bool IsGateOpenValve
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.CMB_GATE_OPEN_VALVE];
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}
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}
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public bool IsGateCloseValve
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.CMB_GATE_CLOSE_VALVE];
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}
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}
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public bool IsLiftPinUp
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{
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get
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{
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return _equipment.crevis.DigitalInputs[Crevis.DigitalInput.WAFER_UP_CYLINDER];
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}
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}
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public bool IsLiftPinDown
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{
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get
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{
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return _equipment.crevis.DigitalInputs[Crevis.DigitalInput.WAFER_DOWN_CYLINDER];
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}
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}
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public bool IsChuckVacuumOn
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.VAC_CHUCK_ON];
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}
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}
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public bool IsChuckVacuumSensorOn
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{
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get
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{
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return _equipment.crevis.DigitalInputs[Crevis.DigitalInput.CMB_VACUUM_PRESSURE];
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}
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}
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public bool IsN2ChamberValveOn
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.N2_CHAMBER_VALVE_ON_SOL];
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}
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}
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public bool IsInposition
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{
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get
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{
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bool isInposition = true;
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isInposition &= _equipment.powerPmac.GetAxisStatus(PmacAxis.Y_Axis, AxisStatus.InPos);
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isInposition &= _equipment.powerPmac.GetAxisStatus(PmacAxis.X_Axis, AxisStatus.InPos);
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isInposition &= _equipment.powerPmac.GetAxisStatus(PmacAxis.T_Axis, AxisStatus.InPos);
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return isInposition;
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}
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}
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public bool IsN2MFCValveOn
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.N2_MFC_VALVE_ON_SOL];
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}
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}
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public bool IsByPassValveOn
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.CMB_BYPASS_ON_SOL];
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}
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}
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public bool IsAirBlowOn
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{
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get
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{
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return _equipment.crevis.DigitalOutputs[Crevis.DigitalOutput.AIR_BLOW_ON];
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}
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}
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public double MFCFlow
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{
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get
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{
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return _equipment.crevis.AnalogInputs[Crevis.AnalogInput.MFC_FLOW_OUT];
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}
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}
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public double MFCSetPoint
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{
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get
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{
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return _equipment.crevis.AnalogOutputs[Crevis.AnalogOutput.MFC_SET_POINT];
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}
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}
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public float MainCDAPressure
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{
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get
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{
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return _equipment.gr200.MainCDAPressure;
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}
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}
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public float MainVacuumPressure
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{
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get
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{
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return _equipment.gr200.MainVacuumPressure;
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}
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}
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public float N2PTPressure
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{
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get
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{
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return _equipment.gr200.N2PTPressure;
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}
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}
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public float MainCDAFlow
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{
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get
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{
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return _equipment.gr200.MainCDAFlow;
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}
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}
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public float ChamberVacuumPressure
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{
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get
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{
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return _equipment.gr200.ChamberVacuumPressure;
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}
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}
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public bool IsLoadPosition
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{
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get
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{
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return _equipment.powerPmac.IsLoadPosition();
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}
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}
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public bool IsCenterPosition
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{
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get
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{
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return _equipment.powerPmac.IsCenterPosition();
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}
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}
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public bool IsPowerMeterPosition
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{
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get
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{
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return _equipment.powerPmac.IsPowerMeterPosition();
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}
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}
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public bool IsAlignPosition
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{
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get
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{
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return _equipment.powerPmac.IsAlignPosition();
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}
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}
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public bool IsBeamProfilePosition
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{
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get
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{
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return _equipment.powerPmac.IsBeamProfilePosition();
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}
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}
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public WaferInfo WaferInfo
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{
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get
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{
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return _equipment.waferInfoManager.GetWaferInfo(WaferInfoManager.WaferNumbers.Chamber);
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}
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}
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public Chamber(Equipment equipment)
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{
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_equipment = equipment;
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}
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public void GateOpen()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.CMB_GATE_CLOSE_VALVE, false);
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.CMB_GATE_OPEN_VALVE, true);
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}
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public void GateClose()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.CMB_GATE_OPEN_VALVE, false);
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.CMB_GATE_CLOSE_VALVE, true);
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}
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public void LiftPinUp()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.WAFER_DOWN_SOL, false);
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.WAFER_UP_SOL, true);
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}
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public void LiftPinDown()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.WAFER_UP_SOL, false);
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.WAFER_DOWN_SOL, true);
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}
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public void ChuckVacuumOn()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.VAC_CHUCK_ON, true);
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}
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public void ChuckVacuumOff()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.VAC_CHUCK_ON, false);
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}
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public void SetMFCFlow(double flow)
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{
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_equipment.crevis.WriteAnalog(Crevis.AnalogOutput.MFC_SET_POINT, flow);
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}
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public void N2ChamberValveOn()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.N2_CHAMBER_VALVE_ON_SOL, true);
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}
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public void N2ChamberValveOff()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.N2_CHAMBER_VALVE_ON_SOL, false);
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}
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public void N2MFCValveOn()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.N2_MFC_VALVE_ON_SOL, true);
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}
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public void N2MFCValveOff()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.N2_MFC_VALVE_ON_SOL, false);
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}
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public void ByPassValveOn()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.CMB_BYPASS_ON_SOL, true);
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}
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public void ByPassValveOff()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.CMB_BYPASS_ON_SOL, false);
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}
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public void AirBlowOn()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.AIR_BLOW_ON, true);
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}
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public void AirBlowOff()
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{
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_equipment.crevis.WriteOutput(Crevis.DigitalOutput.AIR_BLOW_ON, false);
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}
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public bool MoveLoadPosition()
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{
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double loadPositionX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.LoadPosX].Position;
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double loadPositionY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.LoadPosY].Position;
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double loadPositionT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.LoadPosT].Position;
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double speedX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.LoadPosX].Speed;
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double speedY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.LoadPosY].Speed;
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double speedT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.LoadPosT].Speed;
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double accX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.LoadPosX].Accel;
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double accY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.LoadPosY].Accel;
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double accT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.LoadPosT].Accel;
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bool result = _equipment.powerPmac.MoveAbs(PmacAxis.X_Axis, loadPositionX, speedX, accX);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.Y_Axis, loadPositionY, speedY, accY);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.T_Axis, loadPositionT, speedT, accT);
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return result;
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}
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public bool MoveCenterPosition()
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{
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double loadPositionX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.CenterPosX].Position;
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double loadPositionY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.CenterPosY].Position;
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double loadPositionT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.CenterPosT].Position;
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double speedX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.CenterPosX].Speed;
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double speedY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.CenterPosY].Speed;
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double speedT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.CenterPosT].Speed;
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double accX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.CenterPosX].Accel;
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double accY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.CenterPosY].Accel;
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double accT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.CenterPosT].Accel;
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bool result = _equipment.powerPmac.MoveAbs(PmacAxis.X_Axis, loadPositionX, speedX, accX);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.Y_Axis, loadPositionY, speedY, accY);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.T_Axis, loadPositionT, speedT, accT);
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return result;
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}
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public bool MovePowerMeterPosition()
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{
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double powerMeterPositionX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.PowerMeterX].Position;
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double powerMeterPositionY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.PowerMeterY].Position;
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double powerMeterPositionT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.PowerMeterT].Position;
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double speedX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.PowerMeterX].Speed;
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double speedY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.PowerMeterY].Speed;
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double speedT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.PowerMeterT].Speed;
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double accX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.PowerMeterX].Accel;
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double accY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.PowerMeterY].Accel;
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double accT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.PowerMeterT].Accel;
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bool result = _equipment.powerPmac.MoveAbs(PmacAxis.X_Axis, powerMeterPositionX, speedX, accX);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.Y_Axis, powerMeterPositionY, speedY, accY);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.T_Axis, powerMeterPositionT, speedT, accT);
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return result;
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}
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public bool MoveAlignPosition()
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{
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double AlignPositionX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.AlignX].Position;
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double AlignPositionY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.AlignY].Position;
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double AlignPositionT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.AlignT].Position;
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double speedX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.AlignX].Speed;
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double speedY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.AlignY].Speed;
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double speedT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.AlignT].Speed;
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double accX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.AlignX].Accel;
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double accY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.AlignY].Accel;
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double accT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.AlignT].Accel;
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bool result = _equipment.powerPmac.MoveAbs(PmacAxis.X_Axis, AlignPositionX, speedX, accX);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.Y_Axis, AlignPositionY, speedY, accY);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.T_Axis, AlignPositionT, speedT, accT);
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return result;
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}
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public bool MoveBeamProfilePosition()
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{
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double beamProfilePositionX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.BeamProfileX].Position;
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double beamProfilePositionY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.BeamProfileY].Position;
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double beamProfilePositionT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.BeamProfileT].Position;
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double speedX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.BeamProfileX].Speed;
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double speedY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.BeamProfileY].Speed;
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double speedT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.BeamProfileT].Speed;
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double accX = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.X_Axis].TeachList[(int)EnTeachData.BeamProfileX].Accel;
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double accY = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.Y_Axis].TeachList[(int)EnTeachData.BeamProfileY].Accel;
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double accT = _equipment.powerPmac.m_AxisAllList[(int)PmacAxis.T_Axis].TeachList[(int)EnTeachData.BeamProfileT].Accel;
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bool result = _equipment.powerPmac.MoveAbs(PmacAxis.X_Axis, beamProfilePositionX, speedX, accX);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.Y_Axis, beamProfilePositionY, speedY, accY);
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result &= _equipment.powerPmac.MoveAbs(PmacAxis.T_Axis, beamProfilePositionT, speedT, accT);
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return result;
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}
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public bool AllStop()
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{
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bool result = _equipment.powerPmac.MoveStop(PmacAxis.X_Axis);
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result &= _equipment.powerPmac.MoveStop(PmacAxis.Y_Axis);
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result &= _equipment.powerPmac.MoveStop(PmacAxis.T_Axis);
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return result;
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}
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}
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}
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