using SA_LTT.Info.WaferInfo;
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using System;
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using System.Collections;
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using System.Text;
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using System.Threading;
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using static SA_LTT.Info.WaferInfo.WaferInfoManager;
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namespace SA_LTT.Module
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{
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/*
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======== Movement ======================
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Wafer Handling -> Get Ready Get Put Ready Put
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Arm Motion -> Extend arm, Retract arm // 팬던트에서만 하도록.
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Cross Motion -> Dual arm WTR 로봇일 때 // 안하는걸로
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Mapping -> Mapping motion test, Mapping Calibration, Mapping setting, Mapping
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Deflection check -> 블레이드 처짐 감지 , Calibration, setting, check
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Macro -> 무한동작 매크로 (접근 막혀있음)
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====================================
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======== Teaching ======================
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이거는 팬던트에서만 하는게 맞을듯.
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====================================
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======= Speed (%) ==============
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ex ) System 속도 50% , Jog 속도 50% -> 실제 Jog 속도 25%.
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System -> 전체의 동작 속도
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Jog -> System 대비 jog 속도
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Home -> System 대비 Home 속도
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Wafer On -> System 대비 팔을 뻗고 접는 동작
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Wafer Off -> System 대비 팔을 뻗고 접는 동작
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Z Up -> System 대비 Z축 Up 수행시
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Z Down -> System 대비 Z축 Down 수행시
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================================
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======== Monitor ======================
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IO Control -> IO on/off제어, Grip on/off speed 확인
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Input monitor -> 로봇 수신 input 확인.
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output monitor -> 로봇 수신 output 확인
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Limit sensor -> Limit sensor 감지 확인
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ERRLog -> 과거 발생했던 에러 확인
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Serial Port -> 로봇 통신 설정 변경
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====================================
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======== Setup ======================
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Zero degree set -> 모든 축의 원점 위치 현재 로봇의 위치로 설정. // 팬던트에서만
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Calibration -> Z축 탈조 자동 감지 확인 칼리브레이션 수행. // 기능이 있는지 오면 확인.
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Soft limit -> 각축의 이동 가능 범위 재설정. // 팬던트 에서만.
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Motor speed -> 각 축의 Motor 최대 동작 속도 변경 100%(3000RPM) // 팬던트 에서만.
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Mode ->
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Demo mode,
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Interlock mode (외부 Interlock 신호시 로봇 정지 유무),
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retry cnt (Get, Put 동작 실패 시 재시도 횟수) 설정
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Wafer size 설정,
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Non block (1 command 내의 구분동작 연결 속도빠르게) //안씀.
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Time -> 그립형/버큠형 타입의 경우 On/Off 완료 대기 딜레이 시간 조절.(ms)
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====================================
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======== Jog ======================
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이거는 팬던트에서만 하는게 맞을듯.
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====================================
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알람 너무 많은데...
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Alarm 은 하나로 해놓고 Error 내용이랑 Description만 띄우면 되지 않을까?
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*/
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public class Robot : ComPort
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{
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public enum PowerState
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{
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/// <summary>
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/// System initially starting up
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/// </summary>
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Starting,
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/// <summary>
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/// Power off, fatal error has occurred
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/// </summary>
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FatalError,
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/// <summary>
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/// Power off, power sequence restarting
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/// </summary>
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PowerSequencereStarting,
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/// <summary>
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/// Power being turned off, no fault condition has occurred
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/// </summary>
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PowerBeingTrunedOff,
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/// <summary>
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/// Power being turned off, a fault condition has occurred
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/// </summary>
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PowerBeingTurnedOffFault,
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/// <summary>
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/// Power is off, a fault has occurred that must be cleared
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/// </summary>
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PowerOffFault,
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/// <summary>
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/// Power is off, waiting for hardware enable power switch to be turned off
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/// </summary>
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PowerOffWaitingHardware,
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/// <summary>
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/// Power is off, waiting for enable power signal to be asserted
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/// </summary>
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PowerOffWaitingPowerSignal,
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/// <summary>
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/// Power is coming up, enabling amplifiers
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/// </summary>
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PowerComingUp,
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/// <summary>
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/// Power is on, performing motor commutation
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/// </summary>
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PowerOnPerformingMotor,
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/// <summary>
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/// Power is coming up, enabling servos and releasing brakes
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/// </summary>
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PowerComingUpEnablingServos,
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/// <summary>
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/// Power is on, waiting to execute thread or Auto Execution task
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/// </summary>
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PowerOnWaitingExecuteThread,
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/// <summary>
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/// Power is on, executing Auto Execution tas
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/// </summary>
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PowerOnExecutingAuto,
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}
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public enum StageList : int
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{
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Port1 = 1,
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Port2,
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AlignFlip,
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Align,
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Chamber,
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}
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private string _fimwareVersion;
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private bool _isError;
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private bool _isMappingError;
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// 0 ~ 10 서보 off 상태 11 ~ 12 서보 on 상태
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private PowerState _powerStatus;
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private Equipment _equipment;
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private Thread t_statusUpdate;
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private double _positionT;
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private double _positionZ;
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private double _positionR;
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private double _positionF;
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private string _alarmCode;
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private string _alarmDescription;
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private bool _isWaferExist;
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private bool _isVacuumOn;
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private bool _isRun;
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private bool _isPutGetRun;
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private TimeSpan _getTactTime;
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private TimeSpan _putTactTime;
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private TimeSpan _mappingTactTime;
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private Thread t_PutGetSequence;
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public double PositionT
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{
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get
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{
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return _positionT;
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}
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set
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{
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_positionT = value;
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}
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}
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public double PositionZ
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{
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get
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{
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return _positionZ;
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}
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set
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{
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_positionZ = value;
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}
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}
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public double PositionR
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{
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get
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{
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return _positionR;
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}
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set
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{
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_positionR = value;
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}
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}
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public double PositionF
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{
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get
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{
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return _positionF;
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}
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set
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{
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_positionF = value;
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}
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}
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public string AlarmCode
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{
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get
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{
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return _alarmCode;
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}
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set
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{
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_alarmCode = value;
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}
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}
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public string AlarmDescription
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{
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get
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{
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return _alarmDescription;
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}
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set
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{
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_alarmDescription = value;
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}
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}
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public bool IsError
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{
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get
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{
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return _isError;
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}
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set
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{
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_isError = value;
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}
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}
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public PowerState PowerStatus
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{
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get
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{
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return _powerStatus;
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}
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private set
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{
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_powerStatus = value;
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}
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}
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public bool IsVacuumOn
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{
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get
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{
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return _isVacuumOn;
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}
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private set
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{
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_isVacuumOn = value;
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}
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}
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public bool IsRun
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{
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get
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{
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return _isRun;
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}
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set
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{
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_isRun = value;
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}
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}
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public bool IsWaferExist
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{
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get
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{
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return _isWaferExist;
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}
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set
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{
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_isWaferExist = value;
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}
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}
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public bool IsServoOn
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{
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get
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{
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if(_powerStatus == PowerState.PowerOnWaitingExecuteThread || _powerStatus == PowerState.PowerOnExecutingAuto)
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{
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return true;
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}
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else
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{
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return false;
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}
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}
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}
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public bool IsPutGetRun
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{
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get
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{
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return _isPutGetRun;
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}
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set
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{
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_isPutGetRun = value;
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}
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}
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public TimeSpan GetTactTime
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{
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get
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{
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return _getTactTime;
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}
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set
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{
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_getTactTime = value;
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}
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}
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public TimeSpan PutTactTime
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{
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get
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{
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return _putTactTime;
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}
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set
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{
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_putTactTime = value;
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}
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}
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public bool IsRunEnable
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{
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get
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{
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if (IsOpen && IsRun == false && (t_PutGetSequence == null || (t_PutGetSequence.ThreadState == ThreadState.Stopped)))
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{
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return true;
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}
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else
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{
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return false;
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}
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}
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}
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public TimeSpan MappingTactTime
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{
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get
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{
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return _mappingTactTime;
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}
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set
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{
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_mappingTactTime = value;
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}
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}
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public bool IsMappingError
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{
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get
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{
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return _isMappingError;
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}
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set
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{
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_isMappingError = value;
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}
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}
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public Robot(Equipment equipment)
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{
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serialPort.PortName = "COM9";
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serialPort.BaudRate = 57600;
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serialPort.Parity = System.IO.Ports.Parity.None;
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serialPort.DataBits = 8;
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serialPort.StopBits = System.IO.Ports.StopBits.One;
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serialPort.ReadTimeout = 5000;
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ReceiveWaitSeconds = 0.05;
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Terminator = "\r\n";
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_equipment = equipment;
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t_statusUpdate = new Thread(statusUpdate);
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t_statusUpdate.Start();
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_alarmCode = "0";
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}
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public void statusUpdate()
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{
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while (_equipment.IsDisposed == false)
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{
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try
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{
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Thread.Sleep(10);
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if (IsOpen)
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{
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ReadPowerState();
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ReadPosition();
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ReadErrorCode();
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ReadWaferDetected();
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ReadVacuumOn();
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ReadRun();
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}
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else
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{
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if (_equipment.alarmManager.OccurredAlarms.Exists(x => x.Code == SA_LTT.AlarmCode.AL_0052_ROBOT_DISCONNECTED))
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{
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}
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else
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{
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WaferGetInterlock(StageList.Chamber, 1);
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if (Open() == false)
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{
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_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0052_ROBOT_DISCONNECTED);
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}
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else
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{
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Thread.Sleep(100);
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ReadFirmwareVersion();
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}
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}
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}
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}
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catch (Exception e)
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{
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EquipmentLogManager.Instance.WriteExceptionLog(e.StackTrace);
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}
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}
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}
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public void ReadFirmwareVersion()
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{
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if(IsOpen)
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{
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string receivedData;
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WriteRead("VER", out receivedData);
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_fimwareVersion = receivedData;
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}
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else
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{
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// 읽기 실패 알람 ?
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}
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}
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//=================== Movement ======================
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public bool GetReady(StageList stage, int slot = 1)
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{
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if (t_PutGetSequence == null || t_PutGetSequence.ThreadState == ThreadState.Stopped)
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{
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t_PutGetSequence = new Thread(() => GetReadyThread(stage, slot));
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t_PutGetSequence.Start();
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return true;
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}
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else
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{
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return false;
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}
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}
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public void GetReadyThread(StageList stage, int slot = 1)
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{
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try
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{
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DateTime tactTime = DateTime.Now;
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IsPutGetRun = true;
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Write($"GRDY {(int)stage},{slot}");
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DateTime dt = DateTime.Now;
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//동작 진행 확인.
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while (true)
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{
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if (IsRun)
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{
|
break;
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}
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else
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{
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if ((DateTime.Now - dt).TotalSeconds > 5)
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{
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PutTactTime = DateTime.Now - tactTime;
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return;
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}
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}
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}
|
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//동작 진행 완료 확인
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while (true)
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{
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if (IsRun == false)
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{
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break;
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}
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else
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{
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if ((DateTime.Now - dt).TotalMinutes > 3)
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{
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return;
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}
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}
|
}
|
}
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catch (Exception e)
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{
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EquipmentLogManager.Instance.WriteExceptionLog(e.StackTrace);
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}
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finally
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{
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IsPutGetRun = false;
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}
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}
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public bool Get(StageList stage, int slot = 1)
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{
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if (WaferGetInterlock(stage, slot) == false)
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{
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if (t_PutGetSequence == null || t_PutGetSequence.ThreadState == ThreadState.Stopped)
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{
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t_PutGetSequence = new Thread(() => GetThread(stage, slot));
|
t_PutGetSequence.Start();
|
|
return true;
|
}
|
else
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{
|
return false;
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}
|
}
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else
|
{
|
return false;
|
}
|
}
|
|
private void GetThread(StageList stage, int slot)
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{
|
try
|
{
|
DateTime tactTime = DateTime.Now;
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IsPutGetRun = true;
|
|
Write($"GET {(int)stage},{slot}");
|
|
DateTime dt = DateTime.Now;
|
|
//동작 진행 확인.
|
while (true)
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{
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if (IsRun)
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{
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break;
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}
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else
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{
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if ((DateTime.Now - dt).TotalSeconds > 5)
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{
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GetTactTime = DateTime.Now - tactTime;
|
return;
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}
|
}
|
}
|
|
//동작 진행 완료 확인
|
while (true)
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{
|
if (IsRun == false)
|
{
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WaferNumbers sourceNumber;
|
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WaferInfoManager.TryParse((int)stage, slot, out sourceNumber);
|
|
Thread.Sleep(100);
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ReadWaferDetected();
|
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if (IsWaferExist == true)
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{
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if (stage == StageList.AlignFlip)
|
{
|
WaferInfo waferInfo = _equipment.waferInfoManager.GetWaferInfo(sourceNumber);
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waferInfo.IsFlip = !waferInfo.IsFlip;
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_equipment.waferInfoManager.SetWaferInfo(sourceNumber, waferInfo);
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}
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_equipment.waferInfoManager.MoveWaferInfo(sourceNumber, WaferNumbers.Robot);
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}
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else
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{
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EquipmentLogManager.Instance.WriteExceptionLog("Get Error");
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}
|
|
GetTactTime = DateTime.Now - tactTime;
|
break;
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}
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else
|
{
|
if ((DateTime.Now - dt).TotalMinutes > 3)
|
{
|
//Robot 동작완료 TimeOut 3분
|
GetTactTime = DateTime.Now - tactTime;
|
return;
|
}
|
}
|
}
|
}
|
catch (Exception e)
|
{
|
EquipmentLogManager.Instance.WriteExceptionLog(e.StackTrace);
|
}
|
finally
|
{
|
IsPutGetRun = false;
|
}
|
}
|
|
public bool PutReady(StageList stage, int slot = 1)
|
{
|
if (t_PutGetSequence == null || t_PutGetSequence.ThreadState == ThreadState.Stopped)
|
{
|
t_PutGetSequence = new Thread(() => PutReadyThread(stage, slot));
|
t_PutGetSequence.Start();
|
return true;
|
}
|
else
|
{
|
return false;
|
}
|
}
|
|
public void PutReadyThread(StageList stage, int slot = 1)
|
{
|
try
|
{
|
DateTime tactTime = DateTime.Now;
|
IsPutGetRun = true;
|
|
Write($"PRDY {(int)stage},{slot}");
|
|
DateTime dt = DateTime.Now;
|
|
//동작 진행 확인.
|
while (true)
|
{
|
if (IsRun)
|
{
|
break;
|
}
|
else
|
{
|
if ((DateTime.Now - dt).TotalSeconds > 5)
|
{
|
PutTactTime = DateTime.Now - tactTime;
|
return;
|
}
|
}
|
}
|
|
//동작 진행 완료 확인
|
while (true)
|
{
|
if (IsRun == false)
|
{
|
break;
|
}
|
else
|
{
|
if ((DateTime.Now - dt).TotalMinutes > 3)
|
{
|
return;
|
}
|
}
|
}
|
}
|
catch (Exception e)
|
{
|
EquipmentLogManager.Instance.WriteExceptionLog(e.StackTrace);
|
}
|
finally
|
{
|
IsPutGetRun = false;
|
}
|
}
|
|
public bool Put(StageList stage, int slot = 1)
|
{
|
if (WaferPutInterlock(stage, slot) == false)
|
{
|
if (t_PutGetSequence == null || t_PutGetSequence.ThreadState == ThreadState.Stopped)
|
{
|
t_PutGetSequence = new Thread(() => PutThread(stage, slot));
|
t_PutGetSequence.Start();
|
|
return true;
|
}
|
else
|
{
|
return false;
|
}
|
}
|
else
|
{
|
return false;
|
}
|
}
|
|
private void PutThread(StageList stage, int slot)
|
{
|
try
|
{
|
DateTime tactTime = DateTime.Now;
|
IsPutGetRun = true;
|
|
Write($"PUT {(int)stage},{slot}");
|
|
DateTime dt = DateTime.Now;
|
|
//동작 진행 확인.
|
while (true)
|
{
|
if (IsRun)
|
{
|
break;
|
}
|
else
|
{
|
if ((DateTime.Now - dt).TotalSeconds > 5)
|
{
|
PutTactTime = DateTime.Now - tactTime;
|
return;
|
}
|
}
|
}
|
|
//동작 진행 완료 확인
|
while (true)
|
{
|
if (IsRun == false)
|
{
|
WaferNumbers destinationNumber;
|
|
WaferInfoManager.TryParse((int)stage, slot, out destinationNumber);
|
|
Thread.Sleep(100);
|
|
ReadWaferDetected();
|
|
if (IsWaferExist == false)
|
{
|
if (stage == StageList.AlignFlip)
|
{
|
WaferInfo waferInfo = _equipment.waferInfoManager.GetWaferInfo(WaferNumbers.Robot);
|
waferInfo.IsFlip = !waferInfo.IsFlip;
|
_equipment.waferInfoManager.SetWaferInfo(WaferNumbers.Robot, waferInfo);
|
}
|
|
_equipment.waferInfoManager.MoveWaferInfo(WaferNumbers.Robot, destinationNumber);
|
}
|
else
|
{
|
EquipmentLogManager.Instance.WriteExceptionLog("Put Error");
|
}
|
|
PutTactTime = DateTime.Now - tactTime;
|
break;
|
}
|
else
|
{
|
if ((DateTime.Now - dt).TotalMinutes > 3)
|
{
|
//Robot 동작완료 TimeOut 3분
|
PutTactTime = DateTime.Now - tactTime;
|
return;
|
}
|
}
|
}
|
}
|
catch (Exception e)
|
{
|
EquipmentLogManager.Instance.WriteExceptionLog(e.StackTrace);
|
}
|
finally
|
{
|
IsPutGetRun = false;
|
}
|
}
|
|
public bool MappingSeq(int stage)
|
{
|
if (MappingInterlock(stage) == false)
|
{
|
if (t_PutGetSequence == null || t_PutGetSequence.ThreadState == ThreadState.Stopped)
|
{
|
t_PutGetSequence = new Thread(() => MappingTh(stage));
|
t_PutGetSequence.Start();
|
|
return true;
|
}
|
else
|
{
|
return false;
|
}
|
}
|
else
|
{
|
return false;
|
}
|
}
|
|
public bool WaferGetInterlock(StageList stage, int slot)
|
{
|
if(IsWaferExist || IsRunEnable == false || IsPutGetRun)
|
{
|
if(IsWaferExist)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0077_ROBOT_HAS_WAFER);
|
}
|
|
return true;
|
}
|
else
|
{
|
WaferNumbers waferNumber = WaferNumbers.A1;
|
|
if(WaferInfoManager.TryParse((int)stage, slot, out waferNumber))
|
{
|
if (stage == StageList.Port1)
|
{
|
if(_equipment.crevis.DigitalInputs[Crevis.DigitalInput.CST_DETECTOR_1] == false)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0070_PORT1_IS_NOT_DETECTED);
|
return true;
|
}
|
}
|
|
if (stage == StageList.Port2)
|
{
|
if (_equipment.crevis.DigitalInputs[Crevis.DigitalInput.CST_DETECTOR_2] == false)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0071_PORT2_IS_NOT_DETECTED);
|
return true;
|
}
|
}
|
|
if (stage == StageList.AlignFlip || stage == StageList.Align)
|
{
|
if (_equipment.preAligner.IsWaferExist == false)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0072_PREALIGNER_HAS_NOT_WAFER);
|
return true;
|
}
|
|
if(_equipment.preAligner.IsRunEnable == false)
|
{
|
return true;
|
}
|
}
|
|
if (stage == StageList.Chamber)
|
{
|
//Position, Gate, LiftPin Check
|
if (_equipment.powerPmac.IsLoadPosition() == false || _equipment.crevis.DigitalInputs[Crevis.DigitalInput.CMB_GATE_CLOSE] || _equipment.crevis.DigitalInputs[Crevis.DigitalInput.WAFER_DOWN_CYLINDER])
|
{
|
_equipment.SetMessageBox("Chamber position을 확인 해 주세요.");
|
//_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0073_CHAMBER_HAS_NOT_WAFER);
|
return true;
|
}
|
}
|
|
if (_equipment.waferInfoManager.GetWaferInfo(waferNumber).IsStatus == WaferInfo.WaferStatus.Exist)
|
{
|
return false;
|
}
|
else
|
{
|
_equipment.SetMessageBox("이미 Wafer가 존재 하지 않습니다! Wafer 정보를 확인해 주세요.");
|
return true;
|
}
|
}
|
else
|
{
|
return true;
|
}
|
}
|
}
|
|
public bool WaferPutInterlock(StageList stage, int slot)
|
{
|
if(IsWaferExist == false|| IsRunEnable == false || IsPutGetRun)
|
{
|
if (IsWaferExist == false)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0074_ROBOT_HAS_NOT_WAFER);
|
}
|
|
return true;
|
}
|
else
|
{
|
WaferNumbers waferNumber = WaferNumbers.A1;
|
if (WaferInfoManager.TryParse((int)stage, slot, out waferNumber))
|
{
|
if (stage == StageList.Port1)
|
{
|
if (_equipment.crevis.DigitalInputs[Crevis.DigitalInput.CST_DETECTOR_1] == false)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0070_PORT1_IS_NOT_DETECTED);
|
return true;
|
}
|
}
|
|
if (stage == StageList.Port2)
|
{
|
if (_equipment.crevis.DigitalInputs[Crevis.DigitalInput.CST_DETECTOR_2] == false)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0071_PORT2_IS_NOT_DETECTED);
|
return true;
|
}
|
}
|
|
if (stage == StageList.AlignFlip || stage == StageList.Align)
|
{
|
if (_equipment.preAligner.IsWaferExist)
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0075_PREALIGNER_HAS_WAFER);
|
return true;
|
}
|
}
|
|
if (stage == StageList.Chamber)
|
{
|
//Position, Gate, LiftPin Check
|
if (_equipment.powerPmac.IsLoadPosition() == false || _equipment.crevis.DigitalInputs[Crevis.DigitalInput.CMB_GATE_CLOSE] || _equipment.crevis.DigitalInputs[Crevis.DigitalInput.WAFER_DOWN_CYLINDER])
|
{
|
_equipment.SetMessageBox("Chamber position을 확인 해 주세요.");
|
//_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0076_CHAMBER_HAS_WAFER);
|
|
return true;
|
}
|
}
|
|
if (_equipment.waferInfoManager.GetWaferInfo(waferNumber).IsStatus == WaferInfo.WaferStatus.Empty)
|
{
|
return false;
|
}
|
else
|
{
|
_equipment.SetMessageBox("이미 Wafer가 존재 합니다! Wafer 정보를 확인해 주세요.");
|
return true;
|
}
|
}
|
else
|
{
|
return true;
|
}
|
}
|
}
|
|
public bool MappingInterlock(int stage)
|
{
|
if (stage == 1)
|
{
|
if(_equipment.crevis.DigitalInputs[Crevis.DigitalInput.CST_DETECTOR_1])
|
{
|
return false;
|
}
|
else
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0070_PORT1_IS_NOT_DETECTED);
|
return true;
|
}
|
}
|
else if (stage == 2)
|
{
|
if (_equipment.crevis.DigitalInputs[Crevis.DigitalInput.CST_DETECTOR_2])
|
{
|
return false;
|
}
|
else
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0071_PORT2_IS_NOT_DETECTED);
|
return true;
|
}
|
}
|
else
|
{
|
return true;
|
}
|
}
|
|
private void MappingTh(int stage)
|
{
|
DateTime tactTime = DateTime.Now;
|
Mapping(stage);
|
|
DateTime dt = DateTime.Now;
|
|
//동작 진행 확인.
|
while (true)
|
{
|
if (IsRun)
|
{
|
break;
|
}
|
else
|
{
|
if ((DateTime.Now - dt).TotalSeconds > 5)
|
{
|
PutTactTime = DateTime.Now - tactTime;
|
return;
|
}
|
}
|
}
|
|
while (true)
|
{
|
//Run 종료 후 Mapping 결과 받기 시작.
|
if (IsRun == false)
|
{
|
if (stage == 1)
|
{
|
ReadPort1MappingResult();
|
}
|
else if (stage == 2)
|
{
|
ReadPort2MappingResult();
|
}
|
|
MappingTactTime = DateTime.Now - tactTime;
|
break;
|
}
|
else
|
{
|
if ((DateTime.Now - dt).TotalMinutes > 5)
|
{
|
//Robot 동작완료 TimeOut 5분
|
MappingTactTime = DateTime.Now - tactTime;
|
return;
|
}
|
}
|
}
|
}
|
|
private void ReadPort1MappingResult()
|
{
|
string mappingData = _equipment.robot.ReadMappingResult();
|
|
if (mappingData.Length == 25)
|
{
|
IsMappingError = false;
|
for (int i = 0; i < 25; i++)
|
{
|
WaferInfo info = _equipment.waferInfoManager.GetWaferInfo(WaferInfoManager.WaferNumbers.A1 + i);
|
info.SourceNumber = WaferInfoManager.WaferNumbers.A1 + i;
|
info.IsProcessComplete = false;
|
|
if (mappingData[i] == '0')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Empty;
|
}
|
else if (mappingData[i] == '1')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Exist;
|
}
|
else if (mappingData[i] == 'C')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Leaning;
|
}
|
else if (mappingData[i] == 'D')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Overlap;
|
}
|
|
info.RecipeName = _equipment.port1Foup.foupRecipe.RecipeNames[i];
|
_equipment.waferInfoManager.SetWaferInfo(WaferInfoManager.WaferNumbers.A1 + i, info);
|
}
|
}
|
else
|
{
|
IsMappingError = true;
|
for (int i = 0; i < 25; i++)
|
{
|
WaferInfo info = _equipment.waferInfoManager.GetWaferInfo(WaferInfoManager.WaferNumbers.A1 + i);
|
info.IsStatus = WaferInfo.WaferStatus.Empty;
|
info.SourceNumber = WaferInfoManager.WaferNumbers.A1 + i;
|
_equipment.waferInfoManager.SetWaferInfo(WaferInfoManager.WaferNumbers.A1 + i, info);
|
}
|
}
|
}
|
|
private void ReadPort2MappingResult()
|
{
|
string mappingData = _equipment.robot.ReadMappingResult();
|
|
if (mappingData.Length == 25)
|
{
|
IsMappingError = false;
|
for (int i = 0; i < 25; i++)
|
{
|
WaferInfo info = _equipment.waferInfoManager.GetWaferInfo(WaferInfoManager.WaferNumbers.B1 + i);
|
info.SourceNumber = WaferInfoManager.WaferNumbers.B1 + i;
|
info.IsProcessComplete = false;
|
|
if (mappingData[i] == '0')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Empty;
|
}
|
else if (mappingData[i] == '1')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Exist;
|
}
|
else if (mappingData[i] == 'C')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Leaning;
|
}
|
else if (mappingData[i] == 'D')
|
{
|
info.IsStatus = WaferInfo.WaferStatus.Overlap;
|
}
|
|
info.RecipeName = _equipment.port2Foup.foupRecipe.RecipeNames[i];
|
_equipment.waferInfoManager.SetWaferInfo(WaferInfoManager.WaferNumbers.B1 + i, info);
|
}
|
}
|
else
|
{
|
IsMappingError = true;
|
for (int i = 0; i < 25; i++)
|
{
|
WaferInfo info = _equipment.waferInfoManager.GetWaferInfo(WaferInfoManager.WaferNumbers.B1 + i);
|
info.IsStatus = WaferInfo.WaferStatus.Empty;
|
info.SourceNumber = WaferInfoManager.WaferNumbers.B1 + i;
|
_equipment.waferInfoManager.SetWaferInfo(WaferInfoManager.WaferNumbers.A1 + i, info);
|
}
|
}
|
}
|
|
public void Mapping(int stage)
|
{
|
Write($"MAP {stage}");
|
}
|
|
public string ReadMappingResult()
|
{
|
string receivedData;
|
WriteRead("MLD", out receivedData);
|
//0 없음 1 있음 C 기울어짐 D 겹침
|
//000000000000000000000000000000000000000000
|
|
return receivedData;
|
}
|
|
public void Home()
|
{
|
Write("ORG");
|
}
|
|
public void ServoOn()
|
{
|
Write("ENABLE");
|
}
|
|
public void ServoOff()
|
{
|
Write("DISABLE");
|
}
|
|
public void MoveRelative(double x, double y, double z)
|
{
|
Write($"LMI {x},{y},{z}");
|
}
|
|
public void MoveAbsolute(double x, double y, double z)
|
{
|
Write($"LMA {x},{y},{z}");
|
}
|
|
//====================================================
|
|
//=================== Speed ======================
|
public void ReadMappingSpeed()
|
{
|
string receivedData;
|
WriteRead("RMPS", out receivedData);
|
//RMPS V01=030
|
}
|
|
public void SetMappingSpeed(int speed)
|
{
|
Write($"WMPS {speed}");
|
}
|
|
/// <summary>
|
///
|
/// </summary>
|
/// <param name="thickness">1 -> 0.001mm</param>
|
public void SetWaferThickness(int thickness)
|
{
|
Write($"WWTH {thickness}"); //100 -> 1mm
|
}
|
|
public void SetWaferCrossCheckStandard(int standard)
|
{
|
Write($"WSCT {standard}"); // %
|
}
|
|
public void SetWaferDoubleCheckStandard(int standard)
|
{
|
Write($"WSDT {standard}"); // %
|
}
|
//====================================================
|
|
//=================== Monitor =======================
|
public void ReadErrorCode()
|
{
|
string receivedData;
|
|
if (WriteRead("ERR", out receivedData))
|
{
|
AlarmCode = receivedData;
|
|
if (receivedData != "0")
|
{
|
_equipment.alarmManager.Occur(SA_LTT.AlarmCode.AL_0200_ROBOT_ALARM_OCCURED);
|
EquipmentLogManager.Instance.WriteProcessLog($"Robot alarm code : {receivedData}");
|
IsError = true;
|
ReadErrorDescription();
|
}
|
else
|
{
|
AlarmDescription = string.Empty;
|
IsError = false;
|
}
|
}
|
//ERR 201
|
}
|
|
public void ReadErrorDescription()
|
{
|
string receivedData;
|
WriteRead("ERD", out receivedData);
|
AlarmDescription = receivedData;
|
//ERD -1027*JOINT-OUT-OF-RANGE* 1:2 ORG
|
}
|
|
public void ErrorClear()
|
{
|
Write("DRT");
|
}
|
|
public void ReadPowerState()
|
{
|
string receivedData;
|
WriteRead("RPS", out receivedData);
|
|
string[] splitData = receivedData.Split('=');
|
|
PowerState powerState;
|
|
if(splitData.Length == 2 && Enum.TryParse(splitData[1], out powerState))
|
{
|
PowerStatus = powerState;
|
}
|
}
|
|
public void ReadPosition()
|
{
|
string receivedData;
|
WriteRead("NMPS", out receivedData);
|
string[] splitData = receivedData.Split(',');
|
// +0116.791,+0025.006,-0028.258,+0000.000
|
if (splitData.Length == 4)
|
{
|
PositionT = double.Parse(splitData[0]);
|
PositionZ = double.Parse(splitData[1]);
|
PositionR = double.Parse(splitData[2]);
|
PositionF = double.Parse(splitData[3]);
|
}
|
else
|
{
|
|
}
|
}
|
|
public void EMS()
|
{
|
Write("AES");
|
}
|
|
public void ReadSystemSpeed()
|
{
|
string receivedData;
|
WriteRead("RSSP", out receivedData);
|
//RSPD V01 = 100
|
}
|
//====================================================
|
|
//=================== Setup =======================
|
public void SetSystemSpeed(int speed)
|
{
|
Write($"WSSP {speed}");
|
}
|
|
public void ReadJogSpeed()
|
{
|
string receivedData;
|
WriteRead("RJSS", out receivedData);
|
//RJSS V01=030,V02=30
|
}
|
|
public void ReadWaferDetected()
|
{
|
string receivedData;
|
WriteRead("RIDI 1", out receivedData);
|
int dec = 0;
|
|
if (receivedData != string.Empty)
|
{
|
try
|
{
|
dec = Convert.ToInt32(receivedData, 16);
|
|
BitArray bitarray = new BitArray(new byte[] { Convert.ToByte(dec) });
|
|
IsWaferExist = bitarray[0];
|
}
|
catch(Exception e)
|
{
|
|
}
|
}
|
else
|
{
|
|
}
|
}
|
|
public void ReadVacuumOn()
|
{
|
string receivedData;
|
WriteRead("RIDI 5", out receivedData);
|
|
int dec = 0;
|
|
if (receivedData != string.Empty)
|
{
|
try
|
{
|
dec = Convert.ToInt32(receivedData, 16);
|
|
BitArray bitarray = new BitArray(new byte[] { Convert.ToByte(dec) });
|
|
IsVacuumOn = !bitarray[0];
|
}
|
catch (Exception e)
|
{
|
|
}
|
}
|
else
|
{
|
|
}
|
}
|
|
public void ReadRun()
|
{
|
string receivedData;
|
WriteRead("NIDO 1", out receivedData);
|
|
int dec = 0;
|
|
if (receivedData != string.Empty)
|
{
|
try
|
{
|
dec = Convert.ToInt32(receivedData, 16);
|
|
BitArray bitarray = new BitArray(new byte[] { Convert.ToByte(dec) });
|
|
IsRun = bitarray[4];
|
}
|
catch (Exception e)
|
{
|
|
}
|
}
|
else
|
{
|
|
}
|
}
|
|
public void SetJogSpeed(int speed)
|
{
|
Write($"WJSS {speed}");
|
}
|
|
public void ReadHomeSpeed()
|
{
|
string receivedData;
|
WriteRead("RHMS", out receivedData);
|
//RHMS V01=020,V02=20
|
}
|
|
public void SetHomeSpeed(int speed)
|
{
|
Write($"WHMS {speed}");
|
}
|
|
public void ReadWaferOnSpeed()
|
{
|
string receivedData;
|
WriteRead("RHIS", out receivedData);
|
//RHIS V01=060,V02=060
|
}
|
|
public void SetWaferOnSpeed(int speed)
|
{
|
Write($"WHIS {speed}");
|
}
|
|
public void ReadWaferOffSpeed()
|
{
|
string receivedData;
|
WriteRead("RLOS", out receivedData);
|
//RLOS V01=020,V02=020
|
}
|
|
public void SetWaferOffSpeed(int speed)
|
{
|
Write($"WLOS {speed}");
|
}
|
|
public void ReadZSpeed()
|
{
|
string receivedData;
|
WriteRead("RZSP", out receivedData);
|
//RZSP V01=015,V02=015
|
//UP 속도 , DOWN 속도
|
}
|
|
public void SetZSpeed(int upSpeed, int downSpeed)
|
{
|
Write($"WZSP {upSpeed},{downSpeed}");
|
}
|
|
public void EmergencyStop()
|
{
|
Write("AES");
|
}
|
|
public void Pause()
|
{
|
Write("PAUSE 1");
|
}
|
|
public void Run()
|
{
|
Write("PAUSE 0");
|
}
|
|
/// <summary>
|
/// 지정된 채널 번호 부터 m개의 채널 값을 2자리수의 16진로 받습니다.
|
/// 1개의 채널은 8개의 I/O bit 를 포함합니다.
|
/// PRC Input I/O Map 은 I/O 번호가 10001 번부터 시작합니다.
|
/// </summary>
|
public void ReadInput()
|
{
|
string receivedData;
|
WriteRead("NIDI", out receivedData);
|
}
|
|
/// <summary>
|
/// 지정된 채널 번호 부터 m개의 채널 값을 2자리수의 16진로 받습니다.
|
/// 1개의 채널은 8개의 I/O bit 를 포함합니다.
|
/// PRC Output I/O Map 은 I/O 번호가 13 번부터 시작합니다
|
/// </summary>
|
public void ReadOutput()
|
{
|
string receivedData;
|
WriteRead("NIDO", out receivedData);
|
}
|
//====================================================
|
|
public new bool Write(string command)
|
{
|
base.Write(command + $"\r\n");
|
|
return true;
|
}
|
|
public bool WriteRead(string command, out string receivedData)
|
{
|
string data = base.WriteRead(command + $"\r\n");
|
if (data.StartsWith(command.Split(' ')[0]))
|
{
|
receivedData = data.Remove(0, command.Split(' ')[0].Length + 1).Replace($"\r\n", "");
|
return true;
|
}
|
else
|
{
|
receivedData = string.Empty;
|
return false;
|
}
|
}
|
}
|
|
enum RobotAlarm
|
{
|
ERR_NOT_HOMED = 2,
|
ERR_EMERGENCY = 4,
|
ERR_MOTOR_ERROR = 12,
|
ERR_WAIT_TIMEOUT = 190,
|
ENCODER_RESET_TIMEOUT = 193,
|
ERR_INTERLOCK = 194,
|
ERR_DATA_RANGE = 201,
|
ERR_WAFER_BEFORE_GET = 202,
|
ERR_NO_WAFER_BEFORE_PUT = 203,
|
ERR_NO_WAFER_AFTER_GET = 204,
|
ERR_WAFER_AFTER_PUT = 205,
|
ERR_NO_WAFER_DURING_GET = 206,
|
ERR_WAFER_DURING_PUT = 207,
|
ERR_NOT_HOMED_1 = 208,
|
ERR_NOT_SUPPORTED_FUNC = 209,
|
ERR_WAFER_OUT = 210,
|
ERR_WAFER_SLIP = 211,
|
OVER_WAFER_DURING_GET = 212,
|
ERR_PLATE_CHECK = 213,
|
ERR_PUSHER_SPEED_HIGH = 214,
|
ERR_NOT_CORRECT_BLADE_POS = 241,
|
ERR_MAPPING_IS_NOT_PERFORMED = 251,
|
ERR_NO_MAPPING_DATA = 252,
|
ALREADY_LATCH_BLOCKED = 253,
|
ERR_CANNOT_UNGRIP = 300,
|
ERR_INVALID_COMMAND = 301,
|
ERR_INVALID_DATA = 311,
|
ERR_INVALID_STATION = 312,
|
ERR_INVALID_HAND = 313,
|
ERR_INVALID_SLOT = 314,
|
ERR_INVALID_TEACHING_INDEX = 315,
|
ERR_INVALID_PD_INDEX = 316,
|
ERR_INVALID_HAND_TYPE = 317,
|
ERR_BOX_NOEXIT_ERORR = 318,
|
ERR_INVALID_OFFSET = 319,
|
ERR_INVALID_COORDINATE_TYPE = 321,
|
ERR_INVALID_ARGUMENT = 331,
|
ERR_INVALID_FORMAT = 333,
|
ERR_INVALID_LOCATION_FORMAT = 334,
|
ERR_INVALID_PROFILE_FORMAT = 335,
|
ERR_WRONG_PD_COMMAND = 341,
|
ERR_WRONG_AWC_DATA = 342,
|
ERR_NO_AWC_STATION = 343,
|
ERR_WRONG_LATCH_DATA = 344,
|
ERR_NO_LATCH_DATA = 345,
|
ERR_NO_DATA = 351,
|
ERR_NOT_HOME = 352,
|
ERR_CANNOT_RETRACT_ARM = 353,
|
ERR_VACUUM_DETECTING_ERORR = 354,
|
ERR_NO_BOX = 355,
|
ERR_UPGRIP = 356,
|
ERR_DOUBLEBOXCHECH = 357,
|
ERR_ORIGINMANUALLY = 359,
|
ERR_NOTSUPPLY_AIR = 360,
|
ERR_NOW_ON_MOVE = 371,
|
ERR_NOT_READYPOS = 361,
|
Z_POSITION_ERR_DETECTED = 372,
|
ERR_FLIP_TURN_INTERLOCK = 378,
|
ERR_CONTROL_BOX_FAN = 380,
|
ERR_ROBOT_FAN = 381,
|
ERR_AIRSTOP_ERROR = 400,
|
ERR_RECEIVEBUF_FULL = 401,
|
ERR_SENDBUF_FULL = 402,
|
IO_RECEIVE_ERROR = 403,
|
}
|
}
|
