| | |
| | | S5110_MEASURE_MODE_SET_W, |
| | | S5120_MEASURE_MODE_SET_CHECK, |
| | | S5130_ZERO_SET, |
| | | S5210_SCANNER_POSITION_MOVE, |
| | | S5150_MOVE_Z_STAY_POSITION, |
| | | S5160_POSITION_CHECK, |
| | | S5210_SCANNER_POSITION_X_MOVE, |
| | | S5220_SCANNER_MOVE_WAIT, |
| | | S5230_SCANNER_POSITION_Z_MOVE, |
| | | S5240_SCANNER_MOVE_WAIT, |
| | | S5300_SCANNER_INIT, |
| | | S5310_TARGET_POWER_SET, |
| | | S5320_LASER_ON, |
| | |
| | | S5480_LASER_OFF_CHECK, |
| | | S5490_ENERGEY_CHECK, |
| | | S5510_RECIPE_POWER_CHANGE, |
| | | S6000_MOVE_STAY_POSITION, |
| | | S6010_LASER_OFF, //비상정지시 이동 |
| | | S6020_LASER_OFF_CHECK, //비상정지시 이동 |
| | | S6100_MOVE_WAIT, |
| | | S5999_AUTO_POWER_END, |
| | | } |
| | | |