AL_0000_,None,Heavy,True,2022.11.15 10:01:42.811
AL_0001_EMO_STOP_1,None,Heavy,True,2022.11.16 09:00:54.716
AL_0002_EMO_STOP_2,None,Heavy,True,2022.11.16 09:00:54.716
AL_0003_EMO_STOP_3,None,Heavy,True,2022.11.16 09:00:54.716
AL_0004_EMO_STOP_4,None,Heavy,True,2022.11.16 09:00:54.716
AL_0005_SMOKE_DETECTOR_ON,None,Heavy,True,2022.11.16 09:00:54.716
AL_0006_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0007_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0008_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0009_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0010_DOOR_OPEN_1,None,Heavy,False,2023.02.23 14:31:22.274
AL_0011_DOOR_OPEN_2,None,Heavy,False,2023.02.23 14:31:22.274
AL_0012_DOOR_OPEN_3,None,Heavy,False,2023.02.23 14:31:22.274
AL_0013_DOOR_OPEN_4,None,Heavy,False,2023.02.23 14:31:22.274
AL_0014_DOOR_OPEN_CP,None,Heavy,False,2022.11.16 09:00:54.716
AL_0015_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0016_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0017_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0018_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0019_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0020_SERVO_MC_OFF,None,Heavy,True,2022.11.16 09:00:56.094
AL_0021_VACUUM_MC_OFF,None,Heavy,True,2022.11.16 09:00:54.716
AL_0022_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0023_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0024_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0025_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0026_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0027_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0028_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0029_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0030_LASER_WATER_LEAK,None,Heavy,True,2022.11.16 09:00:56.094
AL_0031_CHILLER_WATER_LEAK,None,Heavy,True,2022.11.16 09:00:56.094
AL_0032_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0033_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0034_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0035_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0036_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0037_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0038_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0039_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0040_MAIN_CDA_PRESSURE,Main Valve¸¦ ¿­¾î ÁÖ¼¼¿ä.,Heavy,True,2022.11.16 17:33:55.314
AL_0041_MAIN_VAC_PRESSURE,Main Valve¸¦ ¿­¾î ÁÖ¼¼¿ä.,Heavy,False,2022.11.16 17:33:55.413
AL_0042_MAIN_CDA_FLOW,None,Heavy,True,2022.11.16 09:00:54.716
AL_0043_CMB_VAC_PRESSURE,None,Heavy,True,2022.11.16 09:00:56.094
AL_0044_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0045_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0046_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0047_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0048_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0049_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0050_CREVIS_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0051_PRE_ALIGNER_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0052_ROBOT_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0053_ATTENUATOR_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0054_TEMPCONTROLER_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0055_FFU_DISCONNECTED,None,Light,True,2022.11.23 09:10:30.116
AL_0056_POWER_PMAC_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0057_UV_LASER_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0058_GR200_DISCONNECTED,None,Heavy,True,2022.11.16 09:00:54.716
AL_0059_POWERMETER_DISCONNECTED,None,Heavy,False,2022.11.17 15:28:24.238
AL_0060_POWER_PMAC_DISCONNECTED,None,Heavy,True,2022.11.16 14:12:51.185
AL_0061_CHILLER_DISCONNECTED,None,Heavy,True,2022.11.30 13:13:00.173
AL_0062_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0063_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0064_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0065_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0066_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0067_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0068_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0069_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0070_PORT1_IS_NOT_DETECTED,None,Heavy,True,2022.11.16 14:12:51.185
AL_0071_PORT2_IS_NOT_DETECTED,None,Heavy,True,2022.11.16 14:12:51.185
AL_0072_PREALIGNER_HAS_NOT_WAFER,None,Heavy,True,2022.11.16 14:12:51.185
AL_0073_CHAMBER_HAS_NOT_WAFER,None,Heavy,True,2022.11.16 14:12:51.185
AL_0074_ROBOT_HAS_NOT_WAFER,None,Heavy,True,2022.11.16 14:12:51.185
AL_0075_PREALIGNER_HAS_WAFER,None,Heavy,True,2022.11.16 14:12:51.185
AL_0076_CHAMBER_HAS_WAFER,None,Heavy,True,2022.11.16 14:12:51.185
AL_0077_ROBOT_HAS_WAFER,None,Heavy,True,2022.11.16 14:12:51.185
AL_0078_LDD_IS_NOT_ON,None,Heavy,True,2022.11.16 14:12:51.185
AL_0079_SHUTTER_IS_NOT_OPEN,None,Heavy,True,2022.11.16 14:12:51.185
AL_0080_SET_CURRENT_IS_NOT_ZERO,None,Heavy,True,2022.11.16 14:12:51.185
AL_0081_ENERGY_MEASUREMENT_FAIL,None,Heavy,True,2022.12.19 14:19:31.570
AL_0082_,None,Heavy,True,2022.12.19 14:19:31.570
AL_0083_,None,Heavy,True,2022.12.19 14:19:31.570
AL_0084_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0085_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0086_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0087_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0088_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0089_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0090_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0091_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0092_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0093_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0094_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0095_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0096_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0097_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0098_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0099_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0100_LASER_SOFT_FAULT_HFSYNC,None,Heavy,True,2023.02.09 15:54:06.609
AL_0101_LASER_SOFT_FAULT_LDD_INTERLOCK,None,Heavy,True,2023.02.09 15:54:06.609
AL_0102_LASER_SOFT_FAULT_SHUTTER_INTERLOCK,None,Heavy,True,2023.02.09 15:54:06.609
AL_0103_LASER_SOFT_FAULT_LOW_EXT_FREQUENCY,None,Heavy,True,2023.02.09 15:54:06.609
AL_0104_LASER_BOARD_FAULT_MAIN,None,Heavy,True,2023.02.09 15:54:06.609
AL_0105_LASER_BOARD_FAULT_COMMON,None,Heavy,True,2023.02.09 15:54:06.609
AL_0106_LASER_BOARD_FAULT_TEMPERATURE,None,Heavy,True,2023.02.09 15:54:06.609
AL_0107_LASER_BOARD_FAULT_SENSOR,None,Heavy,True,2023.02.09 15:54:06.609
AL_0108_LASER_BOARD_FAULT_POWER_MONITOR,None,Heavy,True,2023.02.09 15:54:06.609
AL_0109_LASER_BOARD_FAULT_PULSE,None,Heavy,True,2023.02.09 15:54:06.609
AL_0110_LASER_BOARD_FAULT_LDD,None,Heavy,True,2023.02.09 15:54:06.609
AL_0111_LASER_BOARD_FAULT_MOTOR,None,Heavy,True,2023.02.09 15:54:06.609
AL_0112_LASER_SYSTEM_FAULT_MEMORY,None,Heavy,True,2023.02.09 15:54:06.609
AL_0113_LASER_SYSTEM_FAULT_SDCARD,None,Heavy,True,2023.02.09 15:54:06.609
AL_0114_LASER_SYSTEM_FAULT_BOARD_COMMUNICATION,None,Heavy,True,2023.02.09 15:54:06.609
AL_0115_LASER_SYSTEM_FAULT_BOARD_STATE,None,Heavy,True,2023.02.09 15:54:06.609
AL_0116_LASER_GENERAL_ALARM_LDD1,None,Heavy,True,2023.02.09 15:54:06.609
AL_0117_LASER_GENERAL_ALARM_LDD2,None,Heavy,True,2023.02.09 15:54:06.609
AL_0118_LASER_GENERAL_ALARM_QSW,None,Heavy,True,2023.02.09 15:54:06.609
AL_0119_LASER_GENERAL_ALARM_FLOW,None,Heavy,True,2023.02.09 15:54:06.609
AL_0120_LASER_GENERAL_ALARM_WET,None,Heavy,True,2023.02.09 15:54:06.609
AL_0121_LASER_GENERAL_ALARM_HUMIDITY,None,Heavy,True,2023.02.09 15:54:06.609
AL_0122_LASER_GENERAL_ALARM_HFSYNC,None,Heavy,True,2023.02.09 15:54:06.609
AL_0123_LASER_TEMPERATURE_FAULT_0,None,Heavy,True,2023.02.09 15:54:06.609
AL_0124_LASER_TEMPERATURE_FAULT_1,None,Heavy,True,2023.02.09 15:54:06.609
AL_0125_LASER_TEMPERATURE_FAULT_2,None,Heavy,True,2023.02.09 15:54:06.609
AL_0126_LASER_TEMPERATURE_FAULT_3,None,Heavy,True,2023.02.09 15:54:06.609
AL_0127_LASER_TEMPERATURE_FAULT_4,None,Heavy,True,2023.02.09 15:54:06.609
AL_0128_LASER_TEMPERATURE_FAULT_5,None,Heavy,True,2023.02.09 15:54:06.609
AL_0129_LASER_TEMPERATURE_FAULT_6,None,Heavy,True,2023.02.09 15:54:06.609
AL_0130_LASER_TEMPERATURE_FAULT_7,None,Heavy,True,2023.02.09 15:54:06.609
AL_0131_LASER_SOFT_FAULT,None,Heavy,True,2023.02.09 15:54:06.609
AL_0132_LASER_HARD_FAULT,None,Heavy,True,2023.02.09 15:54:06.609
AL_0133_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0134_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0135_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0136_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0137_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0138_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0139_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0140_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0141_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0142_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0143_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0144_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0145_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0146_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0147_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0148_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0149_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0150_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0151_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0152_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0153_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0154_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0155_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0156_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0157_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0158_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0159_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0160_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0161_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0162_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0163_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0164_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0165_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0166_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0167_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0168_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0169_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0170_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0171_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0172_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0173_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0174_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0175_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0176_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0177_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0178_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0179_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0180_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0181_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0182_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0183_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0184_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0185_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0186_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0187_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0188_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0189_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0190_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0191_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0192_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0193_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0194_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0195_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0196_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0197_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0198_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0199_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0200_ROBOT_ALARM_OCCURED,None,Heavy,True,2022.11.17 13:55:10.855
AL_0201_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0202_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0203_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0204_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0205_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0206_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0207_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0208_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0209_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0210_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0211_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0212_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0213_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0214_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0215_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0216_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0217_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0218_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0219_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0220_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0221_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0222_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0223_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0224_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0225_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0226_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0227_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0228_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0229_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0230_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0231_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0232_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0233_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0234_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0235_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0236_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0237_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0238_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0239_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0240_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0241_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0242_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0243_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0244_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0245_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0246_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0247_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0248_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0249_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0250_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0251_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0252_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0253_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0254_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0255_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0256_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0257_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0258_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0259_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0260_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0261_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0262_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0263_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0264_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0265_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0266_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0267_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0268_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0269_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0270_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0271_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0272_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0273_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0274_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0275_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0276_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0277_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0278_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0279_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0280_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0281_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0282_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0283_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0284_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0285_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0286_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0287_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0288_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0289_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0290_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0291_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0292_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0293_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0294_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0295_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0296_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0297_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0298_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0299_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0300_POWER_PMAC_NOT_CONNECTED,None,Heavy,True,2022.11.16 14:12:51.185
AL_0301_POWER_PMAC_INVALID_DEVICE,None,Heavy,True,2022.11.16 14:12:51.185
AL_0302_POWER_PMAC_INVALID_COMMAND,None,Heavy,True,2022.11.16 14:12:51.185
AL_0303_POWER_PMAC_INVALID_RESPONSE,None,Heavy,True,2022.11.16 14:12:51.185
AL_0304_POWER_PMAC_DATA_REAMINS,None,Heavy,True,2022.11.16 14:12:51.185
AL_0305_POWER_PMAC_CMD_LENGTH_EXCEEDS,None,Heavy,True,2022.11.16 14:12:51.185
AL_0306_POWER_PMAC_RES_LENGTH_EXCEEDS,None,Heavy,True,2022.11.16 14:12:51.185
AL_0307_POWER_PMAC_RUNNING_DOWNLOAD,None,Heavy,True,2022.11.16 14:12:51.185
AL_0308_POWER_PMAC_ERROR,None,Heavy,True,2022.11.16 14:12:51.185
AL_0309_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0310_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0311_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0312_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0313_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0314_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0315_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0316_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0317_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0318_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0319_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0320_MOTOR_Y_NEGATIVE_LIMIT,None,Heavy,True,2022.11.16 14:12:51.185
AL_0321_MOTOR_Y_POSITIVE_LIMIT,None,Heavy,True,2022.11.16 14:12:51.185
AL_0322_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0323_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0324_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0325_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0326_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0327_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0328_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0329_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0330_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0331_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0332_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0333_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0334_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0335_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0336_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0337_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0338_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0339_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0340_MOTOR_X_NEGATIVE_LIMIT,None,Heavy,True,2022.11.16 14:12:51.185
AL_0341_MOTOR_X_POSITIVE_LIMIT,None,Heavy,True,2022.11.16 14:12:51.185
AL_0342_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0343_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0344_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0345_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0346_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0347_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0348_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0349_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0350_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0351_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0352_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0353_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0354_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0355_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0356_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0357_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0358_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0359_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0360_MOTOR_T_NEGATIVE_LIMIT,None,Heavy,True,2022.11.16 14:12:51.185
AL_0361_MOTOR_T_POSITIVE_LIMIT,None,Heavy,True,2022.11.16 14:12:51.185
AL_0362_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0363_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0364_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0365_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0366_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0367_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0368_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0369_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0370_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0371_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0372_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0373_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0374_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0375_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0376_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0377_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0378_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0379_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0380_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0381_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0382_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0383_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0384_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0385_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0386_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0387_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0388_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0389_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0390_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0391_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0392_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0393_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0394_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0395_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0396_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0397_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0398_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0399_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0400_CHILLER_LOW_LEVEL_IN_TANK,None,Heavy,True,2022.12.13 10:42:05.686
AL_0401_CHILLER_HIGH_CIRCULATING_FLUID_DISCHARGE_TEMP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0402_CHILLER_CIRCULATING_FLUID_DISCHARGE_TEMP_RISE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0403_CHILLER_CIRCULATING_FLUID_DISCHARGE_TEMP_DROP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0404_CHILLER_HIGH_CIRCULATING_FLUID_RETURN_TEMP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0405_CHILLER_HIGH_CIRCULATING_FLUID_DISCHARGE_PRESSURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0406_CHILLER_ABNORMAL_PUMP_OPERATION,None,Heavy,True,2022.12.13 10:42:05.686
AL_0407_CHILLER_CIRCULATING_FLUID_DISCHARGE_PRESSURE_RISE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0408_CHILLER_CIRCULATING_FLUID_DISCHARGE_PRESSURE_DROP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0409_CHILLER_HIGH_COMPRESSOR_INTANK_TEMP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0410_CHILLER_LOW_COMPRESSOR_INTANK_TEMP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0411_CHILLER_LOW_SUPER_HEAT_TEMPERATURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0412_CHILLER_HIGH_COMPRESSOR_DISCHARGE_PRESSURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0413_CHILLER_REFRIGERANT_CIRCUIT_HIGH_PRESSURE_DROP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0414_CHILLER_REFRIGERANT_CIRCUIT_LOW_PRESSURE_RISE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0415_CHILLER_REFRIGERANT_CIRCUIT_LOW_PRESSURE_DROP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0416_CHILLER_COMPRESSOR_OVER_LOAD,None,Heavy,True,2022.12.13 10:42:05.686
AL_0417_CHILLER_COMMUNICATION_ERROR,None,Heavy,True,2022.12.13 10:42:05.686
AL_0418_CHILLER_MEMORY_ERROR,None,Heavy,True,2022.12.13 10:42:05.686
AL_0419_CHILLER_DC_LINE_FUSE_CUT,None,Heavy,True,2022.12.13 10:42:05.686
AL_0420_CHILLER_CIRCULATING_FLUID_DISCHARGE_TEMP_SENSOR_FAILURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0421_CHILLER_CIRCULATING_FLUID_TEMP_SENSOR_FAILURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0422_CHILLER_COMPRESSOR_INTANK_TEMP_SENSOR_FAILURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0423_CHILLER_CIRCULATING_FLUID_DISCHARGE_PRESSURE_SENSOR_FAILURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0424_CHILLER_COMPRESSOR_DISCHARGE_PRESSURE_SENSOR_FAILURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0425_CHILLER_COMPRESSOR_INTANK_PRESSURE_SENSOR_FAILURE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0426_CHILLER_MAINTENANCE_OF_PUMP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0427_CHILLER_MAINTENENCE_OF_FAN_MOTOR,None,Heavy,True,2022.12.13 10:42:05.686
AL_0428_CHILLER_MAINTENENCE_OF_COMPRESSOR,None,Heavy,True,2022.12.13 10:42:05.686
AL_0429_CHILLER_CONTACT_INPUT_1_SIGNAL_DETECTION_ALARM,None,Heavy,True,2022.12.13 10:42:05.686
AL_0430_CHILLER_CONTACT_INPUT_2_SIGNAL_DETECTION_ALARM,None,Heavy,True,2022.12.13 10:42:05.686
AL_0431_CHILLER_WATER_LEAKAGE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0432_CHILLER_ELECTRIC_RESISTIVITY_COMDUCTIVITY_LEVEL_RISE,None,Heavy,True,2022.12.13 10:42:05.686
AL_0433_CHILLER_ELECTRIC_RESISTIVITY_COMDUCTIVITY_LEVEL_DROP,None,Heavy,True,2022.12.13 10:42:05.686
AL_0434_CHILLER_ELECTRIC_RESISTIVITY_COMDUCTIVITY_SENSOR_ERROR,None,Heavy,True,2022.12.13 10:42:05.686
AL_0435,None,Heavy,True,2022.12.13 10:42:05.686
AL_0436,None,Heavy,True,2022.12.13 10:42:05.686
AL_0437,None,Heavy,True,2022.12.13 10:42:05.686
AL_0438,None,Heavy,True,2022.12.13 10:42:05.686
AL_0439,None,Heavy,True,2022.12.13 10:42:05.686
AL_0440,None,Heavy,True,2022.12.13 10:42:05.686
AL_0441,None,Heavy,True,2022.12.13 10:42:05.686
AL_0442,None,Heavy,True,2022.12.13 10:42:05.686
AL_0443,None,Heavy,True,2022.12.13 10:42:05.686
AL_0444,None,Heavy,True,2022.12.13 10:42:05.686
AL_0445_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0446_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0447_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0448_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0449_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0450_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0451_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0452_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0453_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0454_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0455_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0456_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0457_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0458_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0459_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0460_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0461_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0462_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0463_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0464_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0465_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0466_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0467_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0468_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0469_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0470_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0471_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0472_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0473_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0474_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0475_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0476_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0477_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0478_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0479_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0480_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0481_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0482_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0483_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0484_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0485_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0486_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0487_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0488_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0489_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0490_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0491_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0492_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0493_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0494_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0495_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0496_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0497_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0498_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0499_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0500_PREALIGNER_PIN_UP_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0501_PREALIGNER_PIN_DOWN_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0502_PREALIGNER_VACCUM_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0503_PREALIGNER_NO_WAFER,None,Heavy,True,2022.11.15 10:01:42.811
AL_0504_PREALIGNER_WAFER_LIMIT_ERROR_AFTER_ALIGN,None,Heavy,True,2022.11.15 10:01:42.811
AL_0505_PREALIGNER_NOT_FOUND_NOTCH,None,Heavy,True,2022.11.15 10:01:42.811
AL_0506_PREALIGNER_STAGE_LIMIT_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0507_PREALIGNER_INVALID_ALIGN_COMMAND,None,Heavy,True,2022.11.15 10:01:42.811
AL_0508_PREALIGNER_CHUCK_ARRANGE_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0509_PREALIGNER_WAFER_ALIGN_CCD_OVER,None,Heavy,True,2022.11.15 10:01:42.811
AL_0510_PREALIGNER_WAFER_LIMIT_ERROR_BEFORE_ALIGN,None,Heavy,True,2022.11.15 10:01:42.811
AL_0511_PREALIGNER_RETRACT_HOME,None,Heavy,True,2022.11.15 10:01:42.811
AL_0512_PREALIGNER_WAFER_EXIST,None,Heavy,True,2022.11.15 10:01:42.811
AL_0513_PREALIGNER_CCD_MODULE_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0514_PREALIGNER_ALIGNER_TYPE_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0515_PREALIGNER_COMMAND_ERROR,None,Heavy,True,2022.11.15 10:01:42.811
AL_0516_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0517_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0518_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0519_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0520_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0521_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0522_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0523_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0524_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0525_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0526_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0527_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0528_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0529_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0530_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0531_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0532_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0533_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0534_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0535_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0536_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0537_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0538_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0539_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0540_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0541_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0542_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0543_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0544_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0545_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0546_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0547_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0548_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0549_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0550_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0551_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0552_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0553_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0554_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0555_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0556_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0557_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0558_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0559_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0560_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0561_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0562_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0563_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0564_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0565_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0566_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0567_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0568_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0569_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0570_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0571_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0572_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0573_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0574_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0575_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0576_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0577_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0578_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0579_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0580_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0581_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0582_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0583_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0584_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0585_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0586_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0587_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0588_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0589_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0590_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0591_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0592_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0593_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0594_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0595_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0596_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0597_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0598_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0599_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0600_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0601_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0602_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0603_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0604_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0605_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0606_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0607_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0608_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0609_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0610_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0611_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0612_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0613_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0614_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0615_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0616_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0617_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0618_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0619_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0620_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0621_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0622_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0623_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0624_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0625_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0626_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0627_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0628_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0629_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0630_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0631_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0632_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0633_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0634_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0635_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0636_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0637_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0638_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0639_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0640_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0641_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0642_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0643_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0644_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0645_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0646_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0647_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0648_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0649_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0650_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0651_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0652_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0653_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0654_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0655_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0656_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0657_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0658_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0659_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0660_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0661_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0662_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0663_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0664_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0665_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0666_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0667_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0668_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0669_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0670_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0671_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0672_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0673_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0674_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0675_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0676_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0677_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0678_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0679_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0680_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0681_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0682_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0683_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0684_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0685_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0686_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0687_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0688_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0689_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0690_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0691_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0692_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0693_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0694_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0695_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0696_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0697_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0698_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0699_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0700_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0701_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0702_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0703_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0704_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0705_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0706_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0707_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0708_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0709_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0710_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0711_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0712_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0713_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0714_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0715_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0716_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0717_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0718_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0719_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0720_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0721_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0722_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0723_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0724_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0725_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0726_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0727_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0728_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0729_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0730_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0731_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0732_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0733_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0734_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0735_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0736_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0737_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0738_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0739_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0740_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0741_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0742_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0743_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0744_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0745_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0746_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0747_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0748_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0749_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0750_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0751_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0752_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0753_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0754_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0755_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0756_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0757_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0758_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0759_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0760_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0761_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0762_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0763_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0764_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0765_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0766_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0767_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0768_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0769_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0770_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0771_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0772_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0773_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0774_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0775_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0776_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0777_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0778_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0779_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0780_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0781_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0782_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0783_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0784_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0785_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0786_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0787_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0788_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0789_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0790_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0791_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0792_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0793_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0794_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0795_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0796_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0797_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0798_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0799_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0800_RTC5_NO_BOARD_FOUND,None,Heavy,True,2022.09.15 13:21:17.809
AL_0801_RTC5_ACCESS_DENIED,None,Heavy,True,2022.11.11 14:26:32.000
AL_0802_RTC5_COMMAND_NOT_FORWARDED,None,Heavy,True,2022.09.15 13:21:17.809
AL_0803_RTC5_NO_RESPONSE_FROM_BOARD,None,Heavy,True,2022.09.15 13:21:17.809
AL_0804_RTC5_INVALID_PARAMETER,None,Heavy,True,2022.09.15 13:21:17.809
AL_0805_RTC5_LIST_PROCESSING_IS_NOT_ACTIVE,None,Heavy,True,2022.09.15 13:21:17.809
AL_0806_RTC5_LIST_COMMAND_REJECTED,None,Heavy,True,2022.09.15 13:21:17.809
AL_0807_RTC5_LIST_COMMAND_HAS_BEEN_COVERTED,None,Heavy,True,2022.09.15 13:21:17.809
AL_0808_RTC5_VERSION_ERROR_RTC5_DLL_VERSION,None,Heavy,True,2022.09.15 13:21:17.809
AL_0809_RTC5_VERIFY_ERROR_RTC5_DLL_VERSION,None,Heavy,True,2022.09.15 13:21:17.809
AL_0809_RTC5_VERIFY_ERROR_DOWNLOAD_VERIFICATION,None,Heavy,True,2022.09.15 13:21:17.809
AL_0810_RTC5_DSP_VERSION_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0811_RTC5_DLL_INTERNAL_WINDOWS_MEMORY_REQUEST_FAIL,None,Heavy,True,2022.09.15 13:21:17.809
AL_0812_RTC5_EEPROM_READ_OR_WRITE_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0813_RTC5_ERROR_READING_PCI_CONFIGURATION_REGISTER,None,Heavy,True,2022.09.15 13:21:17.809
AL_0814_RTC5_RESET_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0815_RTC5_UNRESET_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0816_RTC5_FILE_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0817_RTC5_FORMAT_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0818_RTC5_SYSTEM_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0819_RTC5_ACCESS_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0820_RTC5_VERSION_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0821_RTC5_SYSTEM_DRIVER_NOT_FOUND,None,Heavy,True,2022.09.15 13:21:17.809
AL_0822_RTC5_DRIVER_CALL_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0823_RTC5_CONFIGURATION_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0824_RTC5_FPGA_FIRMWARE_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0825_RTC5_PCI_DOWNLOAD_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0826_RTC5_BUSY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0827_RTC5_DSP_MEMORY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0828_RTC5_VERIFY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0829_RTC5_PCI_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0830_RTC5_FILE_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0831_RTC5_MEMORY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0832_RTC5_FILE_OPEN_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0833_RTC5_DSP_MEMORY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0834_RTC5_PCI_DOWNLOAD_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0835_RTC5_SYSTEM_DRIVER_NOT_FOUND,None,Heavy,True,2022.09.15 13:21:17.809
AL_0836_RTC5_PARAMETER_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0837_RTC5_ACCESS_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0838_RTC5_WARNING_3D_CORRECTION_TABLE,None,Heavy,True,2022.09.15 13:21:17.809
AL_0839_RTC5_BUSY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0840_RTC5_PCI_UPLOAD_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0841_RTC5_VERIFY_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_0842_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0843_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0844_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0845_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0846_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0847_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0848_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0849_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0850_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0851_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0852_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0853_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0854_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0855_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0856_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0857_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0858_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0859_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0860_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0861_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0862_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0863_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0864_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0865_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0866_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0867_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0868_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0869_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0870_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0871_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0872_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0873_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0874_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0875_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0876_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0877_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0878_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0879_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0880_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0881_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0882_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0883_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0884_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0885_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0886_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0887_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0888_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0889_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0890_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0891_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0892_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0893_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0894_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0895_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0896_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0897_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0898_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0899_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0900_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0901_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0902_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0903_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0904_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0905_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0906_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0907_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0908_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0909_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0910_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0911_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0912_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0913_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0914_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0915_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0916_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0917_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0918_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0919_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0920_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0921_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0922_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0923_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0924_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0925_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0926_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0927_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0928_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0929_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0930_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0931_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0932_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0933_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0934_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0935_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0936_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0937_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0938_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0939_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0940_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0941_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0942_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0943_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0944_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0945_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0946_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0947_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0948_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0949_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0950_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0951_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0952_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0953_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0954_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0955_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0956_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0957_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0958_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0959_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0960_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0961_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0962_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0963_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0964_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0965_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0966_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0967_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0968_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0969_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0970_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0971_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0972_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0973_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0974_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0975_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0976_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0977_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0978_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0979_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0980_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0981_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0982_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0983_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0984_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0985_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0986_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0987_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0988_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0989_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0990_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0991_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0992_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0993_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0994_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0995_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0996_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0997_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0998_,None,Heavy,True,2022.09.15 13:21:17.809
AL_0999_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1000_ERR_NOT_HOMED,None,Heavy,True,2022.09.15 13:21:17.809
AL_1001_ERR_EMERGENCY,None,Heavy,True,2022.09.15 13:21:17.809
AL_1002_ERR_MOTOR_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_1003_ERR_WAIT_TIMEOUT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1004_ENCODER_RESET_TIMEOUT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1005_ERR_INTERLOCK,None,Heavy,True,2022.09.15 13:21:17.809
AL_1006_ERR_DATA_RANGE,None,Heavy,True,2022.09.15 13:21:17.809
AL_1007_ERR_WAFER_BEFORE_GET,None,Heavy,True,2022.09.15 13:21:17.809
AL_1008_ERR_NO_WAFER_BEFORE_PUT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1009_ERR_NO_WAFER_AFTER_GET,None,Heavy,True,2022.09.15 13:21:17.809
AL_1010_ERR_WAFER_AFTER_PUT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1011_ERR_NO_WAFER_DURING_GET,None,Heavy,True,2022.09.15 13:21:17.809
AL_1012_ERR_WAFER_DURING_PUT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1013_ERR_NOT_HOMED,None,Heavy,True,2022.09.15 13:21:17.809
AL_1014_ERR_NOT_SUPPORTED_FUNC,None,Heavy,True,2022.09.15 13:21:17.809
AL_1015_ERR_WAFER_OUT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1016_ERR_WAFER_SLIP,None,Heavy,True,2022.09.15 13:21:17.809
AL_1017_OVER_WAFER_DURING_GET,None,Heavy,True,2022.09.15 13:21:17.809
AL_1018_ERR_PLATE_CHECK,None,Heavy,True,2022.09.15 13:21:17.809
AL_1019_ERR_PUSHER_SPEED_HIGH,None,Heavy,True,2022.09.15 13:21:17.809
AL_1020_ERR_NOT_CORRECT_BLADE_POS,None,Heavy,True,2022.09.15 13:21:17.809
AL_1021_ERR_MAPPING_IS_NOT_PERFORMED,None,Heavy,True,2022.09.15 13:21:17.809
AL_1022_ERR_NO_MAPPING_DATA,None,Heavy,True,2022.09.15 13:21:17.809
AL_1023_ALREADY_LATCH_BLOCKED,None,Heavy,True,2022.09.15 13:21:17.809
AL_1024_ERR_CANNOT_UNGRIP,None,Heavy,True,2022.09.15 13:21:17.809
AL_1025_ERR_INVALID_COMMAND,None,Heavy,True,2022.09.15 13:21:17.809
AL_1026_ERR_INVALID_DATA,None,Heavy,True,2022.09.15 13:21:17.809
AL_1027_ERR_INVALID_STATION,None,Heavy,True,2022.09.15 13:21:17.809
AL_1028_ERR_INVALID_HAND,None,Heavy,True,2022.09.15 13:21:17.809
AL_1029_ERR_INVALID_SLOT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1030_ERR_INVALID_TEACHING_INDEX,None,Heavy,True,2022.09.15 13:21:17.809
AL_1031_ERR_INVALID_PD_INDEX,None,Heavy,True,2022.09.15 13:21:17.809
AL_1032_ERR_INVALID_HAND_TYPE,None,Heavy,True,2022.09.15 13:21:17.809
AL_1033_ERR_BOX_NOEXIT_ERORR,None,Heavy,True,2022.09.15 13:21:17.809
AL_1034_ERR_INVALID_OFFSET,None,Heavy,True,2022.09.15 13:21:17.809
AL_1035_ERR_INVALID_COORDINATE_TYPE,None,Heavy,True,2022.09.15 13:21:17.809
AL_1036_ERR_INVALID_ARGUMENT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1037_ERR_INVALID_FORMAT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1038_ERR_INVALID_LOCATION_FORMAT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1039_ERR_INVALID_PROFILE_FORMAT,None,Heavy,True,2022.09.15 13:21:17.809
AL_1040_ERR_WRONG_PD_COMMAND,None,Heavy,True,2022.09.15 13:21:17.809
AL_1041_ERR_WRONG_AWC_DATA,None,Heavy,True,2022.09.15 13:21:17.809
AL_1042_ERR_NO_AWC_STATION,None,Heavy,True,2022.09.15 13:21:17.809
AL_1043_ERR_WRONG_LATCH_DATA,None,Heavy,True,2022.09.15 13:21:17.809
AL_1044_ERR_NO_LATCH_DATA,None,Heavy,True,2022.09.15 13:21:17.809
AL_1045_ERR_NO_DATA,None,Heavy,True,2022.09.15 13:21:17.809
AL_1046_ERR_NOT_HOME,None,Heavy,True,2022.09.15 13:21:17.809
AL_1047_ERR_CANNOT_RETRACT_ARM,None,Heavy,True,2022.09.15 13:21:17.809
AL_1048_ERR_VACUUM_DETECTING_ERORR,None,Heavy,True,2022.09.15 13:21:17.809
AL_1049_ERR_NO_BOX,None,Heavy,True,2022.09.15 13:21:17.809
AL_1050_ERR_UPGRIP,None,Heavy,True,2022.09.15 13:21:17.809
AL_1051_ERR_DOUBLEBOXCHECH,None,Heavy,True,2022.09.15 13:21:17.809
AL_1052_ERR_ORIGINMANUALLY,None,Heavy,True,2022.09.15 13:21:17.809
AL_1053_ERR_NOTSUPPLY_AIR,None,Heavy,True,2022.09.15 13:21:17.809
AL_1054_ERR_NOW_ON_MOVE,None,Heavy,True,2022.09.15 13:21:17.809
AL_1055_ERR_NOT_READYPOS,None,Heavy,True,2022.09.15 13:21:17.809
AL_1056_Z_POSITION_ERR_DETECTED,None,Heavy,True,2022.09.15 13:21:17.809
AL_1057_ERR_FLIP_TURN_INTERLOCK,None,Heavy,True,2022.09.15 13:21:17.809
AL_1058_ERR_CONTROL_BOX_FAN,None,Heavy,True,2022.09.15 13:21:17.809
AL_1059_ERR_ROBOT_FAN,None,Heavy,True,2022.09.15 13:21:17.809
AL_1060_ERR_AIRSTOP_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_1061_ERR_RECEIVEBUF_FULL,None,Heavy,True,2022.09.15 13:21:17.809
AL_1062_ERR_SENDBUF_FULL,None,Heavy,True,2022.09.15 13:21:17.809
AL_1063_IO_RECEIVE_ERROR,None,Heavy,True,2022.09.15 13:21:17.809
AL_1064_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1065_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1066_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1067_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1068_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1069_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1070_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1071_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1072_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1073_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1074_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1075_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1076_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1077_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1078_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1079_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1080_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1081_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1082_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1083_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1084_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1085_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1086_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1087_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1088_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1089_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1090_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1091_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1092_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1093_,None,Heavy,True,2022.09.15 13:21:17.809
AL_1094_,None,Heavy,True,2022.09.15 13:21:17.809
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