0
1
SERVO
Y_AXIS
P30
P31
10000
920
-48
20000
1200000
10
Y Load Pos
400
200
250
Y Center Pos
240
200
250
Y BeamProfile Pos
225
200
250
Y PowerMeter Pos
180.8896
200
250
Y Align Pos
268.4253
200
250
Y Test Pos
173
200
250
1
2
SERVO
X_AXIS
P20
P21
10000
550
0
10000
1200000
30
X Load Pos
173
100
250
X Center Pos
178
200
250
X BeamProfile Pos
173
200
250
X PowerMeter Pos
-10.5846
200
250
X Align Pos
-20.8701
100
250
X Test Pos
173
200
250
2
5
SERVO
T_AXIS
P40
P41
4062.7
5
-5
20000
1200000
1
T Load Pos
0
1
200
T Center Pos
0
1
200
T BeamProfile Pos
0
1
200
T PowerMeter Pos
0
1
200
T Align Pos
0
1
200
T Test Pos
0
1
200